Growth and migration of nanocavities in He+ multi-implanted Si measured by in situ small-angle X-ray scattering

Dumont, M.; Regula, G.; Coulet, Marie‐Vanessa; Beaufort, M. F.; Ntsoenzok, E.; Pichaud, B.

doi:10.1016/j.mseb.2013.11.006

Cited by 8 publications

(3 citation statements)

References 30 publications

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“…This first indicates that the observations of mobile bubbles made at higher temperatures actually concerned empty, i.e., voids, or weakly filled cavities. This confirms with no ambiguities previous observations by Griffioen et al [21] or more recently by Dumont et al [31]. Moreover, this is in line with the theoretical work of Evans who has shown that for moderate annealing temperature up to 1273 K, the coarsening of voids is due to migration and coalescence [28].…”

Section: Discussionsupporting

confidence: 92%

“…The comparison between the Cerofolini's model and the first-order effusion rate equation suggested by Griffioen et al and often used in the literature [23,24,31,57] to describe helium effusion from bubbles [black dashed line in Fig. 3(k)], clearly emphasized that finite-size effects should be taken into account when dealing with a dense fluid.…”

Section: Helium Detrapping Kinetics Modelingmentioning

confidence: 92%

“…x-ray scattering) for instance [30,31]. In theory, combining these experiments could allow following the structural and chemical evolution of the bubbles.…”

Section: Introductionmentioning

confidence: 99%

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Evolution of the properties of helium nanobubbles during in situ annealing probed by spectrum imaging in the transmission electron microscope

et al. 2018

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The evolution of nanometric helium bubbles in silicon has been investigated using spatially resolved electron energy-loss spectroscopy during in situ annealing in the transmission electron microscope. This approach allows the simultaneous determination of both the morphology and the helium density in the bubbles at each step of the annealing. Structural modification and helium emission from bubbles of various diameters in the range 7.5 to 20 nm and various aspect ratios of 1.1 to 1.9 have been studied. We clearly show that helium emission takes place at temperatures where bubble migration had hardly started. At higher temperatures, the migration (and coalescence) of voids is clearly revealed. For helium density lower than 150 He nm −3 , the Cerofolini's model taking into account the thermodynamical properties of an ultradense fluid reproduces well the helium emission from the bubbles, leading to an activation energy of 1.8 eV. When bubbles exhibit a higher initial helium density, the Cerofolini's model fails to reproduce the helium emission kinetics. We ascribe this to the fact that helium may be in the solid phase and we propose a tentative model to take into account the properties of the solid.

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Section: Discussionsupporting

confidence: 92%