Growth behavior of CVD diamond films with enhanced electron field emission properties over a wide range of experimental parameters

Jia, Xinyi; Huang, Nan; Guo, Yi; Liu, Lusheng; Zhai, Zhaofeng; Yang, Bing; Yuan, Zhengqiu; Shi, Dan; Jiang, Xin

doi:10.1016/j.jmst.2018.04.021

Cited by 28 publications

(10 citation statements)

References 47 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…9, b представлены вольт-амперограммы в координатах Шоттки ( √ E; ln( j)), характерных для надбарьерной эмиссии. Для покрытий на основе алмазной фазы (в т. ч. для алмазов, пассивированных водородом) а также для графиталмазных композитов характерен автоэмиссионный механизм [10,13]. В то же время, согласно [85], надбарьерная эмиссия по механизму Шоттки может давать вклад в эмиссию полиеносодержащих структур, для которых эмиссия обеспечивается полимерной компонентой, а транспорт электронов -графитизированной субструктурой.…”

Section: электронная эмиссия под действием электрического поляunclassified

“…Стоит отметить, что как PVD-(физическое осаждение из газовой фазы), так и CVD-процесс позволяет в ходе одноэтапного технологического процесса формировать структуры, содержащие наноалмазную и аморфную фазы (a-C : ND-структуры), свойства которых в существенной степени изменяются при вариации параметров осаждения [13][14][15][16]. В [15] показано, что наноалмазы, инкапсулированные в матрицу аморфного углерода, возможно формировать путем магнетронного распыления наноалмазной мишени.…”

Section: Introductionunclassified

See 1 more Smart Citation

Полученные плазменно-химическим осаждением a-C : ND покрытия: взаимосвязь эмиссионных свойств и фазового состава

Завидовский¹,

Стрелецкий²,

Татаринцев³

et al. 2023

Физика Твердого Тела

View full text Add to dashboard Cite

The coatings comprised of the nanodiamond-based and amorphous-carbon-based phases (a-C:ND coatings) are investigated. The a-C:ND coatings were synthesized by chemical vapor deposition in the arc discharge plasma (by plasma chemical deposition) at various concentrations of Ar/H2/CH4. Raman spectroscopy showed that, apart from the diamond substructure, studied coatings contain amorphous-carbon-based and polyene-based phases, while diamond phase is passivated by hydrogen to different degrees. The interplay between the deposition parameters and materials' structure is analysed. It was shown that the ordering of the amorphous substructure and the formation of the phase boundaries affect the electron transport and secondary electron emission properties. The subject of the investigation of the true secondary electron spectra for the analysis of the nanostructured carbon materials is analysed. It was shown that the change of the polyene fraction in the structure of the samples leads to the variation of the ratio of field emission and thermionic emission. The influence of the structure and phase composition of the samples on their electron emission properties is investigated. In particular, their effect on the turn on-field, which value varied in the 9-18 V/μm range for the studied samples, is analysed.

show abstract

Section: электронная эмиссия под действием электрического поляunclassified

Section: Introductionunclassified

Полученные плазменно-химическим осаждением a-C : ND покрытия: взаимосвязь эмиссионных свойств и фазового состава

Завидовский¹,

Стрелецкий²,

Татаринцев³

et al. 2023

Физика Твердого Тела

View full text Add to dashboard Cite

show abstract

“…Based on this theory, an experimental scheme for measuring small displacements and strains using a white light interferometer was proposed for verification. This method is easy to operate and has high-precision testing capabilities [12]. By collecting data at fixed points, there is no need for scanning motion, thereby enhancing the ability to resist environmental noise.…”

Section: Introductionmentioning

confidence: 99%

Measurement method for multilayer film thickness based on wide spectral interference

qin,

Zhu,

Liu

et al. 2023

Third International Computing Imaging Conference (CITA 2023)

View full text Add to dashboard Cite

With the rapid development of modern aerospace, national security technology and processes, thin films are widely used in fields such as semiconductors, optics, electronics, and aerospace. The precise control and measurement of their thickness have a crucial impact on the performance and quality of products, as the film preparation process, real-time feedback, and post film performance testing are all closely related to thin film detection technology. At present, this is also a widely recognized research direction. Traditional contact detection methods typically require expensive equipment and complex operations and may cause scratches and damage to the tested surface, making them unsuitable for practical applications. Therefore, studying a simple, fast, and accurate method for detecting thin film thickness is of great significance. The thin film detection method based on optical principles has become an important means in the field of detection and processing both domestically and internationally. In this paper, a fast measurement method for multilayer film thickness based on wide spectral interference principle is proposed, which is a very promising method. This technology utilizes changes in interference fringes to measure the thickness of thin films, which has the advantages of non-contact, high-precision, and high-resolution. The feasibility and accuracy of proposed method have been verified through theoretical analysis and simulation in this article.

show abstract

“…Nevertheless, these materials face issues of dissatisfactory device lifetime, insufficient long-term emission stability, as well as complex cathode assembly. , Although diamond, as a unique material endowed with many excellent physical and chemical properties [e.g., incomparable mechanical properties and thermal conductivity, high breakdown electric field, superb carrier mobility, chemical inertness, and negative electron affinity (NEA) when terminated with hydrogen, etc. ], could show better lifetime stability and reliability, its intrinsic insulating nature would result in a high E TO and a low J max . − Additionally, although hybrid composites such as CNTs/diamond or graphene nanowalls/diamond have been investigated for FEE enhancement, the complicated growth procedures and multimaterial features are still crucial challenges.…”

Section: Introductionmentioning

confidence: 99%

Vertically Aligned Boron-Doped Diamond Hollow Nanoneedle Arrays for Enhanced Field Emission

Zheng

Liu

Wang

et al. 2022

ACS Appl. Nano Mater.

View full text Add to dashboard Cite

Lower turn-on field (E TO) and threshold field (E THR), as well as a higher current density, are desired characteristics of materials and structures for field emission (FE) applications. In this work, the properties of a boron-doped diamond (BDD) hollow nanoneedle array (HNNA) structure were remarkably enhanced through surface state modulation. By designedly controlling the surface roughness and boron concentration of the BDD film, a uniform and dense HNNA with a high aspect ratio (∼21.3) was constructed by applying O2 + Cl2 inductively coupled plasma reactive ion etching (ICP-RIE) for an optimal duration (90 min). Although the maximum HNNA density (∼5.5 × 106 mm–2) is produced at a shorter duration, the overall FE performance is even worse than that of the BDD film without an HNNA, arising from the field shielding effect and incomplete elimination of defective needles. The finally formed Actiniaria tentacle-like HNNA structure is associated with the masking role of oxidized Si and amorphous carbon on the top edge of the needle embryos, resulting from the electric field edge effect and Si supply accompanying the substrate. Meanwhile, the sp2 carbon generated by ICP-RIE on the surface of the as-etched HNNA promotes the FE, showing a minimum E TO of 0.11 V/μm. After moderate hydrogen plasma treatment, owing to the negative electron affinity (NEA) of C–H on p-type BDD with downward band bending of the conduction band minimum and local electric field enhancement induced by the hollow nanostructure, the hydrogen-terminated BDD–HNNA shows excellent FE stability and a linear Fowler–Nordheim relation with a lower E TO of 0.38 V/μm and E THR of 2.21 V/μm and a desirable current density of 6532 μA/cm2 at 3.75 V/μm. The comprehensive FE properties of the surface-modulated high-quality BDD–HNNA exceed those of the vast majority of other conventional or popular nanostructural counterparts.

show abstract

Growth behavior of CVD diamond films with enhanced electron field emission properties over a wide range of experimental parameters

Cited by 28 publications

References 47 publications

Полученные плазменно-химическим осаждением a-C : ND покрытия: взаимосвязь эмиссионных свойств и фазового состава

Полученные плазменно-химическим осаждением a-C : ND покрытия: взаимосвязь эмиссионных свойств и фазового состава

Measurement method for multilayer film thickness based on wide spectral interference

Vertically Aligned Boron-Doped Diamond Hollow Nanoneedle Arrays for Enhanced Field Emission

Contact Info

Product

Resources

About