Growth conditions of the cubic phase cBN in boron nitride films

Oechsner, Hans

doi:10.1016/j.tsf.2005.12.072

Cited by 6 publications

(1 citation statement)

References 20 publications

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“…But only 20% of cBN content can be found at this condition. This observation considered with the investigation by Oechsner et al [9] . The higher substrate temperature enhanced the adsorption state and surface diffusion length of the hBN atoms clusters sputtered from the hBN target.…”

Section: Substrate Temperaturesupporting

confidence: 79%

Preparation of Nanocrystalline Cubic Boron Nitride Coating by Magnetron Sputtering Method

Liu

Zhang

et al. 2015

KEM

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Cubic Boron Nitride (cBN) has wide application prospect in the field of high performance cutting tool, for its outstanding mechanical properties. In this paper, the cBN coating was synthesized on cement carbide by chemical vapor deposition nanocrystalline diamond interlayer in radio frequency magnetron sputtering system. The SEM, FTIR and AFM were used to investigate the microstructure, purity and morphology of the cBN film. The research was carried out on the effect of the deposition parameters on the cBN content in the film. High temperature and high pressure locally in the substrate is an important factor of transformation of cubic phase BN from hexagonal phase BN. There is a narrow optimization parameters window in cBN synthesis by ion bombardment assist radio frequency magnetron sputtering method. The good quality of cBN film can be obtained by a combination of moderate substrate bias voltage and gas pressure, high substrate temperature and a certain N2 partial pressure.

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Section: Substrate Temperaturesupporting

confidence: 79%