Growth Dynamics of Nanocrystalline Diamond Thin Films Deposited by Hot Filament Chemical Vapor Deposition: Influence of Low Sticking and Renucleation Processes

Buijnsters, Josephus Gerardus; Vazquez, L.

doi:10.1021/jp201919r

Cited by 21 publications

(22 citation statements)

References 63 publications

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“…This is fully in line with the outcomes of several previous studies 43,66,67 that showed that the absolute value of the RMS roughness of nanograined diamond films depends both on the gas mixture and the primary nucleation site density.…”

Section: Acs Paragon Plus Environmentsupporting

confidence: 92%

“…[43][44][45] In fact, all the synthesized NCD films in this study are of a lower crystalline order than the strongly faceted NCD films with high purity grown from extremely high diamond seed densities and carbon-lean gas atmosphere, 2 and they are commonly referred to as 'ballas' or cauliflower-type diamond. 2,39 The smoothest NCD films with most uniform surface morphology were grown on the Mo, Nb, and W metallic thin films (Figures 7b, 7c, and 7f, respectively).…”

Section: Growth Of Smooth and Dense Ncd Filmsmentioning

confidence: 98%

“…( 43,44 that is frequently observed in CVD processes. [43][44][45] In fact, all the synthesized NCD films in this study are of a lower crystalline order than the strongly faceted NCD films with high purity grown from extremely high diamond seed densities and carbon-lean gas atmosphere, 2 and they are commonly referred to as 'ballas' or cauliflower-type diamond.…”

Section: Growth Of Smooth and Dense Ncd Filmsmentioning

confidence: 98%

“…The relatively high methane-to-hydrogen gas ratio of 2.5% used for the NCD film growth results in a high supersaturation of carbon precursors at the cost of gaseous etchants such as atomic hydrogen. 43,46 Such a growth scenario promotes a relatively high number of defects that facilitate crystal twinning and the re-nucleation of diamond crystallites during the NCD film growth. 47 The grain boundary structure thus produced is commonly characterized by the incorporation of minority non-diamond carbon phases, such as amorphous carbon and t-PA. 47 However, visible Raman spectra of NCD materials are dominated by emission from the grain boundaries, although these regions typically account for less than 5% of the grown material.…”

Section: Page 18 Of 45 Acs Paragon Plus Environmentmentioning

confidence: 99%

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Metallic Seed Nanolayers for Enhanced Nucleation of Nanocrystalline Diamond Thin Films

et al. 2013

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ABSTRACT:The enhancement of the nucleation and subsequent growth of nanocrystalline diamond (NCD) films with a submicron thickness control on silicon substrates is demonstrated by using a sputter deposition of six different metallic (Cr, Mo, Nb, Ti, V, and W) seed nanolayers. The effectiveness of altered surface morphology and surface chemistry is discussed. We show that the number density of nanodiamond particles embedded on the nanorough metallic surfaces after an ultrasonic seeding step together with the dynamic surface chemistry during hot-filament chemical vapor deposition of diamond determine the nucleation kinetics, microstructure and surface topography of the NCD films. Overall, the smoothest NCD layer (root-mean-square roughness 10 nm) was obtained with the highest seed density of diamond nanoparticles anchored to the metallic (W) surface. In particular, the rapid carbide-forming metals Mo, Nb and W showed the highest number density of diamond crystallites formed during the NCD nucleation stage, which resulted in dense, uniform and very smooth NCD films. Much rougher NCD films (17-37 nm) were obtained on the Cr, Ti, and V nanolayers that did not form carbides rapidly.Importantly, the carbon phase purity of the grown NCD films remains unaffected by the presence of different metallic seed nanolayers. Furthermore, we have assessed that the metallic nanolayer surface morphology does not play a relevant role in the enhancement of the seeding step.

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Section: Acs Paragon Plus Environmentsupporting

confidence: 92%

Section: Growth Of Smooth and Dense Ncd Filmsmentioning

confidence: 98%

Section: Growth Of Smooth and Dense Ncd Filmsmentioning

confidence: 98%

Section: Page 18 Of 45 Acs Paragon Plus Environmentmentioning

confidence: 99%

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Metallic Seed Nanolayers for Enhanced Nucleation of Nanocrystalline Diamond Thin Films

et al. 2013

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“…Therefore, studies have investigated the use of UNCD as a MEMS material. 15) Although a few researchers have used a hot filament CVD apparatus for the synthesis of the UNCD, 16) most of the samples have been synthesized by a microwave plasma CVD apparatus. 17) Moreover, Si was used as the substrate in the CVD process.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD

Tsubota

Amano

Kojo

et al. 2013

J. Ceram. Soc. Japan

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Diamond film and ultrananocrystalline diamond (UNCD) film were synthesized on BeCu alloy substrate by using hot filament CVD apparatus. We succeed in the synthesis of diamond film and Boron-doped electrically conductive diamond film on the substrate. Moreover, UNCD film was successfully synthesized by the CVD apparatus, although this film was not electrically conductive electrically conductive. At the first stage of the CVD process for UNCD, needle-shape deposits appeared. A two-step process, that is, the synthesis of UNCD and then boron-doped diamond, was effective for the synthesis of the electrically conductive diamond film having smooth surface.

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Structural Colors Based on Diamond Metasurface for Information Encryption

Liu

Meng

et al. 2023

Advanced Optical Materials

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Structural colors based on dielectric metasurfaces are attractive because of their potential application in next‐generation color printing. However, the commonly used dielectric materials suffer from issues of high light absorption (e.g., Si at blue wavelength) and low resistance to corrosion (e.g., titanium oxide), which greatly limit their application as structural color for information encryption. Here, dielectric‐metasurface‐based structural color constructed on nanocrystalline diamond (NCD) film by using bias enhanced nucleation (BEN) technique is demonstrated. Owing to the formation of highly crystalline diamond by the BEN process, the synthesized NCD film with a thickness of ~500 nm exhibits excellent optical quality with a relatively high refractive index that produces a strong magnetic dipole mode by Mie resonance. To realize the dynamic functionalities of diamond‐metasurface color with high resolution, a periodic array of asymmetric diamond cuboids with high aspect ratio (≈3.1) is fabricated, which produces polarization‐dependent response due to the enhanced Mie resonance. By optimizing the configuration of the diamond‐metasurface system, the color performance is improved with high brightness and a relatively wide gamut. This work demonstrates for the first time that NCD can serve as a robust and highly tunable dielectric platform for application in information encryption.

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Growth Dynamics of Nanocrystalline Diamond Thin Films Deposited by Hot Filament Chemical Vapor Deposition: Influence of Low Sticking and Renucleation Processes

Cited by 21 publications

References 63 publications

Metallic Seed Nanolayers for Enhanced Nucleation of Nanocrystalline Diamond Thin Films

Metallic Seed Nanolayers for Enhanced Nucleation of Nanocrystalline Diamond Thin Films

Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD

Structural Colors Based on Diamond Metasurface for Information Encryption

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