Growth of {100}-oriented lead zirconate titanate thin films mediated by a safe solvent

Abstract

1-Methoxy-2-propanol was found to be a promising safe alternative to carcinogenic and teratogenic 2-methoxyethanol as solvent for chemical solution deposition of {100}-oriented lead zirconate titanate thin films on platinized silicon.

Large pyroelectric energy conversion in lead scandium tantalate thin films

“…The substrate was first coated with a 23 nm thick hafnia buffer layer using atomic layer deposition [ 26 ]. To initiate the desired perovskite structure, lead titanate (0.1 M concentration) was used as a seed layer using sol-gel deposition [ 27 ] with the conditions reported in the literature [ 28 ]. PST solution was then spin coated at 3000 rpm for 30 s followed by drying and pyrolysis for 120 s at 130 °C and 350 °C respectively.…”

Stress–Charge Nonlinear Physical Description and Tensor Symmetries for Piezoelectric Materials

“…Since its discovery, several fabrication techniques have been developed to obtain piezoelectric materials, where the chemical-based techniques have been of interest due to the requirements of thin-film technologies [2]. Deposition techniques such as metal-oxide chemical vapor deposition (MOCVD) [3] and chemical solution deposition (CSD) [4] are current research topics. Furthermore, there are CMOS-compatible deposition techniques, since these processes have low fabrication temperatures, such as sputtering-based techniques, which can obtain high levels of crystallinity [5,6], being an ideal fabrication process to apply the nonlinear phenomena of piezoelectric materials in a new scope of applications [7][8][9][10].…”

“…Numeration of point groups of crystal systems and Laue groups. The identification number corresponds to that used inTables 3,4 and A1 to show the symmetry structure of the high-order tensors for each type of material.…”

Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings

“…The comparison of these three common methods is summarized in Table 1. The sol-gel (also called chemical solution deposition, CSD) method is based on the reactions of precursor solutions and the schematic process is shown in Figure 1a [13]. First, precursor solutions with proper stoichiometry of Coatings 2021, 11, 944 2 of 22 metal ions were prepared while Pb was usually added in excess of 10%−20% to compensate the volatilization.…”

“…Therefore, physical deposition methods have been introduced to fabricate PZT thin films due to their controllable stoichiometric composition and robust interface bonding. [13]; (b) pulsed laser deposition based on physical interactions by laser heating. Reprinted with permission from [14] Copyright 2010 Elsevier; (c) magnetron sputtering technique based on physical interactions by ion bombardment.…”