Growth of a HVPE-AlGaN Epilayers with High Al Contents on Si (111) Substrates

Jeon, Injun; Lee, Gang Seok; Bae, Sung Geun; Yang, Miin-Shen; Yi, Sam Nyung; Ahn, Hyung Soo; Jeon, Ho-Seok; Yu, Young Moon; Kim‡, Suck-Whan

doi:10.3938/npsm.66.1106

New Physics: Sae Mulli

2016

DOI: 10.3938/npsm.66.1106

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Growth of a HVPE-AlGaN Epilayers with High Al Contents on Si (111) Substrates

Injun Jeon¹,

Gang Seok Lee²,

Sung Geun Bae³

et al.

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Growth of a HVPE-AlGaN Epilayers with High Al Contents on Si (111) Substrates

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