Growth of a hybrid garnet crystal multilayer structure by combinatorial pulsed laser deposition

Gazia, Rossana; May-Smith, T.C.; Eason, R.W.

doi:10.1016/j.jcrysgro.2008.05.035

Cited by 18 publications

(18 citation statements)

References 28 publications

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“…The angle of incidence of the plumes onto the substrate was varied repeatedly over a range of 8°, in order to obtain a flat thickness profile. Laser fluence was approximately equal for both plumes, at values of ~1 J per cm 2 , and target-substrate distance was ~50 mm for both targets.…”

Section: Methodsmentioning

confidence: 96%

“…The setup for deposition was similar to that used previously by Gazia et al [2]. UV pulses (wavelength 266 nm) from two frequency quadrupled, flashlamp-pumped Nd:YAG lasers were incident upon rotating single-crystal garnet targets of Gd 3 Ga 5 O 12 (GGG) and doped (2 at.…”

Section: Methodsmentioning

confidence: 99%

“…Preliminary investigations have shown that the technique may be used to grow designer materials or alloys with deliberately engineered physical properties [2] and to enable greater control over film stoichiometry [3]. Notably, combinatorial PLD can also facilitate deposition of materials that cannot currently be fabricated via conventional, single laser, single target PLD.…”

Section: Introductionmentioning

confidence: 99%

“…It has also been shown recently that two dissimilar garnets may be combined to yield a penternary single-crystal film [2]. The growth of films with specified, mixed compositions therefore presents the ideal scenario for selection and optimisation of various material parameters, such as refractive index, lattice constant and 4 thermal expansion coefficient, for applications in crystalline optical waveguide design and fabrication.…”

Section: Introductionmentioning

confidence: 99%

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The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser, multi-target combinatorial pulsed laser deposition

Sloyan

May-Smith

Eason

et al. 2009

Applied Surface Science

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We report the effects of relative time delay of plasma plumes on thin garnet crystal films fabricated by dual-beam, combinatorial pulsed laser deposition. Relative plume delay was found to affect both the lattice constant and elemental composition of mixed Gd 3 Ga 5 O 12 (GGG) and Gd 3 Sc 2 Ga 3 O 12 (GSGG) films. Further analysis of the plasmas was undertaken using a Langmuir probe, which revealed that for relative plume delays shorter than ~200 µs, the second plume travels through a partial vacuum created by the first plume, leading to higher energy ion bombardment of the growing film. The resulting in-plane stresses are consistent with the transition to a higher value of lattice constant normal to the film plane that was observed around this delay value. At delays shorter than ~10 µs, plume propagation was found to overlap, leading to scattering of lighter ions from the plume and a change in stoichiometry of the resultant films.

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Section: Methodsmentioning

confidence: 96%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser, multi-target combinatorial pulsed laser deposition

Sloyan

May-Smith

Eason

et al. 2009

Applied Surface Science

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“…Stoichiometry control and the ability to engineer physical properties have been reported [4,5], and the multi-beam approach shows significant promise for graded-layer growth. The potential exists, therefore, for the fabrication of sophisticated rib and channel waveguides and lasers using the combined PLD/precision machining technique detailed above.…”

mentioning

confidence: 99%

Fabrication of multilayer crystalline rib waveguides by a combined multi-step Pulsed Laser Deposition/precision machining technique

Sloyan

Carpenter

May-Smith

et al. 2011

2011 Conference on Lasers and Electro-Optics Europe and 12th European Quantum Electronics Conference (CLEO EUROPE/EQEC)

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With low thresholds and high gain, channel and rib waveguide lasers are of interest both as stand-alone devices and as components in integrated optical circuits. A number of approaches may be taken to fabricate such structures, including direct bonding, ion implantation or diffusion and post-processing of deposited films. However, many of these techniques can be prohibitively slow and costly, particularly for rapid prototyping.Pulsed Laser Deposition (PLD) is a comparatively quick and versatile deposition method that can be used to grow a wide range of materials, including those with complex stoichiometries. One such family of materials are optical garnets, which are of particular interest for laser applications. Many garnets, including Gd 3 Ga 5 O 12 (GGG), have been grown previously via PLD, with high growth rates (microns per hour) and low losses (<0.1 dBcm -1 ) [1]. We present a technique that combines PLD with precision sawing (used previously to machine silica-on-silicon cantilevers [2]) to create multilayer crystalline garnet ribs quickly and easily.A prototype has been fabricated as a proof of concept (see Figure 1). A three-layer structure comprising a Nd:GGG (1 at. %) layer sandwiched between two layers of undoped GGG was deposited onto a single-crystal Y 3 Al 5 O 12 (YAG) substrate. Each layer was ~1 µm in thickness. Pairs of grooves of ~8 µm depth and ~60 µm width were then cut into the film and substrate using a precision dicing saw. The resulting ~20 µm wide, 10 mm long multilayer ribs were subsequently overgrown via PLD with a further undoped GGG cladding layer. X-ray diffraction analysis of the sample shows that the crystal layers have grown in the epitaxial (100) direction and with a peak FWHM similar to that of the substrate, indicating good crystal quality. Fig. 1 (a) Cross-section schematic and (b) scanning electron microscope micrograph of a ~20 µm wide multilayer rib. A three-layer stack of undoped GGG, Nd-doped GGG and undoped GGG were grown on a YAG substrate, which was then machined using a precision saw. A cladding layer of undoped GGG was overgrown after machining, also via PLD.

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Pulsed Laser Deposition for Complex Oxide Thin Film and Nanostructure

Chen

2016

Advanced Nano Deposition Methods

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Growth of a hybrid garnet crystal multilayer structure by combinatorial pulsed laser deposition

Cited by 18 publications

References 28 publications

The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser, multi-target combinatorial pulsed laser deposition

The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser, multi-target combinatorial pulsed laser deposition

Fabrication of multilayer crystalline rib waveguides by a combined multi-step Pulsed Laser Deposition/precision machining technique

Pulsed Laser Deposition for Complex Oxide Thin Film and Nanostructure

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