2002
DOI: 10.1063/1.1532772
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Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy

Abstract: Ordered gallium arsenide (GaAs) nanowires are grown by molecular-beam epitaxy on GaAs (111)B substrates using Au-catalyzed vapor–liquid–solid growth defined by nanochannel alumina (NCA) templates. Field-emission scanning electron microscope images show highly ordered nanowires with a growth direction perpendicular to the substrate. The size (i.e., diameter) distribution of the wires is drastically narrowed by depositing the gold catalyst through an NCA template mask; this narrows the size distribution of the g… Show more

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Cited by 167 publications
(104 citation statements)
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“…The NWs are preferred to grow along the [111] direction in the case of ZB phase and along the [0001] in the case of WZ. Subsequently, the Aucatalyzed VLS method was successfully used to grow III-V NWs by other techniques, including molecular beam epitaxy (MBE) [63,64] and chemical beam epitaxy (CBE) [65,66].…”
Section: Nw Growth Mechanismsmentioning
confidence: 99%
“…The NWs are preferred to grow along the [111] direction in the case of ZB phase and along the [0001] in the case of WZ. Subsequently, the Aucatalyzed VLS method was successfully used to grow III-V NWs by other techniques, including molecular beam epitaxy (MBE) [63,64] and chemical beam epitaxy (CBE) [65,66].…”
Section: Nw Growth Mechanismsmentioning
confidence: 99%
“…For NW growth in combination with molecular beam epitaxy (MBE) most often gold is used as catalyst [12][13][14].…”
Section: Introductionmentioning
confidence: 99%
“…Since that time, this method has been investigated, analyzed and improved by several groups [12,17,18,19,20]. The VLS method can be implemented with several growth techniques such as vapor phase epitaxy (VPE) [16,17], laser ablation [19], metal-organic vapor phase epitaxy (MOVPE) [18], chemical beam epitaxy (CBE) [12], and molecular beam epitaxy (MBE) [20].…”
Section: Nanowire Growthmentioning
confidence: 99%