2000
DOI: 10.1016/s0022-0248(00)00706-5
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Growth of GaN film on a-plane sapphire substrates by plasma-assisted MOCVD

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Cited by 21 publications
(18 citation statements)
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“…16 Gallium nitride has been grown on an Al 2 O 3 substrate in the wurtzite structure with its [0001] direction along the surface normal. 5 Previously, a rotation of 30°between the Al 2 O 3 and the GaN structures, resulting from the lattice mismatch at the GaN/Al 2 O 3 interface, was reported by Sugianto et al 17 The lattice parameters of the hexagonal Gd 2 O 3 structure are 0.386 and 0.616 nm, whereas they are 0.318 and 0.517 nm for GaN. 18 Hence, a similar mismatch is also present at the Gd 2 O 3 /GaN interface.…”
Section: Discussionmentioning
confidence: 95%
“…16 Gallium nitride has been grown on an Al 2 O 3 substrate in the wurtzite structure with its [0001] direction along the surface normal. 5 Previously, a rotation of 30°between the Al 2 O 3 and the GaN structures, resulting from the lattice mismatch at the GaN/Al 2 O 3 interface, was reported by Sugianto et al 17 The lattice parameters of the hexagonal Gd 2 O 3 structure are 0.386 and 0.616 nm, whereas they are 0.318 and 0.517 nm for GaN. 18 Hence, a similar mismatch is also present at the Gd 2 O 3 /GaN interface.…”
Section: Discussionmentioning
confidence: 95%
“…The occurrence of stacking faults is somewhat surprising, as they had not been observed in either our conventional or our pendeo-epitaxial [0 0 0 1]-oriented GaN films grown on 6H-SiC(0 0 0 1) substrates. As expected, the wing regions contain reduced densities of dislocations and stacking Table 1 Results of DOE studies with n ¼ 2 full factorial with a center-point to determine the effect of temperature and V/III ratio on the growth rate of GaN vertically from the ð1 1 2 0Þ surface (V) and laterally from both the Ga-terminated (0 0 0 1) face (Lg) and the N-terminated ð0 0 0 1Þface (Ln) and on the ratios Rg (Lg/V) and Rn (Ln/V) faults in comparison to both the seed regions of the sample and to other reported [9][10][11][12] values of dislocation density in GaN ð1 1 2 0Þ films where no lateral growth techniques were employed. The wing regions also contain large areas where dislocations are not observed; this is equivalent to a density of $1 Â 10 6 cm À2 , the lowest reasonable value for this metric that can be determined from a few TEM micrographs.…”
Section: Article In Pressmentioning
confidence: 95%
“…This spatial separation causes a reduction in oscillator strength and a red shift in optical transitions due to a reduced quantum recombination efficiency [8] in quantum wells in III-nitride optoelectronic devices grown along the polar c-axis. To circumvent these effects, non-polar GaN-based layers have been grown and characterized on non-polar substrates including a-plane 4H-SiCð1 12 0Þ [9], and on non-c-axisoriented materials including r-plane sapphire ð1 1 0 2Þ [10,11], a-plane sapphire ð1 1 2 0Þ [12], and tetragonal (g) LiAlO 2 [13]. Devices have been fabricated [14][15][16][17][18] on nonpolar GaN-based layers, and direct comparisons of nonpolar and polar devices [19] have also been reported.…”
Section: Introductionmentioning
confidence: 99%
“…Traditionally, many approaches have been developed for the preparation of gallium nitride, such as metal organic vapor phase extension (MOVPE) [11][12][13][14], the molecular beam extension (MBE) [15,16], the hydride vapor phase extension (HVPE) [17] and alumina templates method [18,19]. Qian and co-workers [20] reported a benzene-thermal route to prepare nanocrystalline gallium nitride.…”
Section: Introductionmentioning
confidence: 99%