2000
DOI: 10.1016/s0022-0248(99)00418-2
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Growth of silicon carbide by sublimation sandwich method in the atmosphere of inert gas

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Cited by 33 publications
(21 citation statements)
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“…However, the HVPE has some disadvantages-the use of the hydrogen chloride may introduce additional impurity in the form of chlorine. While in sublimation sandwich method (SSM) only high-purity ammonia is used as the reacting gas, this method has been applied to grow AlN [11,12], SiC [13,14] and appears to be promising for the growth of thick GaN layers [15,16] (0 0 0 1) with 3 mm GaN thin film grown by MOCVD was used as the substrate. To ensure gallium transfer, temperature gradient was employed between the gallium source and the substrate (DT ¼ 70 1C).…”
Section: Introductionmentioning
confidence: 99%
“…However, the HVPE has some disadvantages-the use of the hydrogen chloride may introduce additional impurity in the form of chlorine. While in sublimation sandwich method (SSM) only high-purity ammonia is used as the reacting gas, this method has been applied to grow AlN [11,12], SiC [13,14] and appears to be promising for the growth of thick GaN layers [15,16] (0 0 0 1) with 3 mm GaN thin film grown by MOCVD was used as the substrate. To ensure gallium transfer, temperature gradient was employed between the gallium source and the substrate (DT ¼ 70 1C).…”
Section: Introductionmentioning
confidence: 99%
“…11 According to formulas (6)(7)(8), the pressures of these three main gases reduce with decreasing temperature, thus the crystal growth rate decreases. 14 The PVT-TC technique also enables crystal growth with a stable value of the N Si /N C ratio. At the initiate stages of the PVT technique, Si grains are added to prevent the seed from being carbonized, which results in a high pressure of Si around the seed crystal surface and increasing N Si /N C , as shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Nevertheless, these technologies are high expensive and the length of the as-synthesized nanowires is too short to be applied in nanofabrications. Sublimation sandwich method (SSM) is a modified sublimation technique which was introduced to grow singlecrystal SiC and GaN thick films [22][23][24]. The main feature of SSM is the closer distance of about several millimeters between source and substrate, which can intensify mass transport during the growth of film [25].…”
Section: Introductionmentioning
confidence: 99%