2005
DOI: 10.1016/j.apsusc.2004.07.003
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Growth of ZnS films by chemical vapor deposition of Zn[S2CN(CH3)2]2 precursor

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Cited by 37 publications
(17 citation statements)
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“…It is observed that the film produced at 748 K is mainly amorphous, but increasing the annealing temperature from 773 to 823 K results in crystallic development with the maximum peak intensity obtained at 823 K. The XRD patterns show that the films have mixture of hexagonal (a) and cubic phases (b) with a predominance of the cubic phase (b). In many studies [19][20][21][22], depending on the preparation technique and synthesis conditions such as the temperature and precursor concentrations, zinc sulfide has both the cubic and/or hexagonal structures. For example, Afifi et al [8] reported a cubic phase for ZnS thin films prepared by spray pyrolysis technique at 823 K, which is in agreement with our result at 823 K. Hichou et al [22] reported a polycrystalline ZnS thin film with combination of cubic and hexagonal phases at 773 K using the spray pyrolysis technique, consistent with the results of our study.…”
Section: Methodsmentioning
confidence: 99%
“…It is observed that the film produced at 748 K is mainly amorphous, but increasing the annealing temperature from 773 to 823 K results in crystallic development with the maximum peak intensity obtained at 823 K. The XRD patterns show that the films have mixture of hexagonal (a) and cubic phases (b) with a predominance of the cubic phase (b). In many studies [19][20][21][22], depending on the preparation technique and synthesis conditions such as the temperature and precursor concentrations, zinc sulfide has both the cubic and/or hexagonal structures. For example, Afifi et al [8] reported a cubic phase for ZnS thin films prepared by spray pyrolysis technique at 823 K, which is in agreement with our result at 823 K. Hichou et al [22] reported a polycrystalline ZnS thin film with combination of cubic and hexagonal phases at 773 K using the spray pyrolysis technique, consistent with the results of our study.…”
Section: Methodsmentioning
confidence: 99%
“…ZnS films can be deposited by several physical methods such as pulsed-laser deposition [21], RF reactive magnetron sputtering [22], chemical vapor deposition [23], atomic layer deposition [24], as well as some chemical methods including spray pyrolysis [25], sol-gel [26], and electrodeposition [27]. Although the physical techniques result in better quality thin films, these methods require a vacuum, high quality targets, and high energy; all of which make for a significant hurdle, economically.…”
Section: Introductionmentioning
confidence: 99%
“…To account for this, a constant thickness offset must be added to Eq. (9). This is further justified by the fact that zinc sulfide has a relatively high vapor pressure of $10 À5 torr, and may outgas during chamber evacuation.…”
Section: Figurementioning
confidence: 95%
“…Therefore, a thickness offset of 0.3E 0 is added to Eq. (9) prior to normalization. This has the effect of flattening the distribution over the lens surface.…”
Section: Figurementioning
confidence: 99%
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