2020
DOI: 10.3390/s20236788
|View full text |Cite
|
Sign up to set email alerts
|

Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure

Abstract: In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers, the simulated reflectance spectra, and optical field distributions under GMR conditions showed that multiple waveguide modes can be excited in the PWS. These modes can be used for refractive index sensing, and the t… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
4
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
6

Relationship

1
5

Authors

Journals

citations
Cited by 9 publications
(6 citation statements)
references
References 30 publications
0
4
0
Order By: Relevance
“…Therefore, sensors based on the phase detection of waves supported by a 1DPhC are feasible [ 22 , 23 , 24 , 25 , 26 , 27 ]. In addition, they represent an alternative to relative humidity sensors based on resonances of surface plasmons [ 16 ], BSWs [ 16 ], whispering gallery modes [ 28 ], guided modes [ 4 , 7 , 29 ], photonic crystal modes [ 30 ], and lossy modes [ 31 , 32 ].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, sensors based on the phase detection of waves supported by a 1DPhC are feasible [ 22 , 23 , 24 , 25 , 26 , 27 ]. In addition, they represent an alternative to relative humidity sensors based on resonances of surface plasmons [ 16 ], BSWs [ 16 ], whispering gallery modes [ 28 ], guided modes [ 4 , 7 , 29 ], photonic crystal modes [ 30 ], and lossy modes [ 31 , 32 ].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, to assess the goodness of a biosensor, one must consider not only bulk sensitivity but also the Figure of Merit (FOM) for biosensors, which combines the sharpness of the resonance through its FWHM and the biosensor's bulk sensitivity, expressed as FOM = Sλ /FWHM. Typical FOM values for standard SPR-based sensors range from 75 to 150 RIU -1 [37,38], which are slightly lower than those of standard GMR-based sensors (220-450 RIU -1 ) [39,40]. Improvements in FWHM values (less than nm) in PhC cavities result in larger FOM values (525-1,550 RIU -1 ) [40][41].…”
Section: Biosensor Performancementioning
confidence: 97%
“…[ 23 ] GMR is a diffraction phenomenon with intense coupling resonance in grating diffraction due to the matching of waveguide mode and grating parameters. [ 24,25 ] The interaction can cause very sharp resonance peaks in the reflection or transmission spectrum. The phase‐matching condition was fulfilled by the following formula [ 26 ] β=ω0normalcsinθ+m2πp,false(m=1,2,3false)where the wave vector k = ω 0 / c of free space vacuum, θ is the incident angle, and m is the diffraction order of the grating.…”
Section: Structure and Theorymentioning
confidence: 99%
“…[23] GMR is a diffraction phenomenon with intense coupling resonance in grating diffraction due to the matching of waveguide mode and grating parameters. [24,25] The interaction can cause very sharp resonance peaks in the reflection or transmission spectrum. The phase-matching condition was fulfilled by the following formula [26]…”
Section: Structure and Theorymentioning
confidence: 99%