Gyroscope sensing and self-calibration architecture based on signal phase shift

Casinovi, G.; Norouzpour-Shirazi, Arashk; Dalal, M.; Ayazi, Farrokh

doi:10.1016/j.sna.2016.01.045

Cited by 12 publications

(5 citation statements)

References 17 publications

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“…When there is an angular rate input, due to the effect of the Coriolis force, mass produce relative displacement in the Y direction. The dynamic equation of two modes can be written [2,3]: …”

Section: Theory Of Parametric Amplificationmentioning

confidence: 99%

The Realization of the Parametric Excitation on MEMS Gyroscope

Qian

Zhao

et al. 2017

Proceedings of the 2017 International Conference on Applied Mathematics, Modeling and Simulation (AMMS 2017)

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Abstract-In this paper, parametric excitation is applied to the excitation of a micro-ring gyroscope. The primary objective of this work is to improve the dynamic gain. It is show that, by adjusting the parametric excitation parameters, the harmonic forcing can be reduced whilst the gain of frequency response can be amplified. Because of the different frequencies of the excitation and harmonic forcing, the unwanted effect of electrical feed-through can keep in a minimum value.

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Section: Theory Of Parametric Amplificationmentioning

confidence: 99%

The Realization of the Parametric Excitation on MEMS Gyroscope

Qian

Zhao

et al. 2017

Proceedings of the 2017 International Conference on Applied Mathematics, Modeling and Simulation (AMMS 2017)

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“…Наиболее существенные погрешности трехосного стабилизатора формируются его чувствительными эле ментами -двухстепенными гироскопами [12]. Поэтому следует, прежде всего, уменьшить погрешности чувст вительных элементов [13,14].…”

Section: анализ литературных данныхunclassified

“…Размещение осей может быть различным. Наиболее часто встречаемым вариан том является такой, когда одна ось платформы пер пендикулярна к ее плоскости (вертикальна), а другие две -располагаются вдоль продольной и поперечной осей платформы [12].…”

Section: материалы и методы исследованияunclassified

Creation of nonperturbative horizontal panel of operating table for mobile hospital in the helicopter

Мельник

Карачун

Шибецкий

2016

TAPR

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“…Among gyroscopes composed of sensitive structures, only the axisymmetric structure can achieve high precision. The axisymmetric structure includes the cylinder-shaped and bell-shaped [23,24,25,26,27]. Among them, the consumer MEMS gyro mostly adopts the traditional tuning fork structure, which cannot meet the application requirements of high precision and special environments.…”

Section: Introductionmentioning

confidence: 99%

Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

et al. 2019

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This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24 capacitive electrodes were designed for drive and sense according to the advantageous characteristics of a thin-shell vibrating gyroscope. Then, based on the elastic mechanics and thin-shell theory, a mathematical stiffness model of the double U-beam was established. The maximum mode resonant frequency error calculated by the DUVRG stiffness model, finite element analysis (FEA) and experiments was 0.04%. DUVRG structures were manufactured by an efficient fabrication process using silicon-on-glass (SOG) and deep reactive ion etching (DRIE), and the FEA value and theoretical calculation had differences of 5.33% and 5.36% with the measured resonant frequency value, respectively. Finally, the static and dynamic performance of the fabricated DUVRG was tested, and the bias instability and angular random walk were less than 8.86 (°)/h and 0.776 (°)/√h, respectively.

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Gyroscope sensing and self-calibration architecture based on signal phase shift

Cited by 12 publications

References 17 publications

The Realization of the Parametric Excitation on MEMS Gyroscope

The Realization of the Parametric Excitation on MEMS Gyroscope

Creation of nonperturbative horizontal panel of operating table for mobile hospital in the helicopter

Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

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