2007 IEEE/RSJ International Conference on Intelligent Robots and Systems 2007
DOI: 10.1109/iros.2007.4399083
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H∞ deflection control of a unimorph piezoelectric cantilever under thermal disturbance

Abstract: The effect of the temperature variation on a unimorph piezoelectric cantilever is studied. Its influences on the thermal expansion, the piezoelectric constant, the transient part and the creep are experimentally analyzed. Afterwards, a H∞ controller is synthesized in order to reject the thermal disturbance and to reach performances required in micromanipulation. Finally, the closed-loop experiments end the paper.

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Cited by 12 publications
(10 citation statements)
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“…In this paper, we propose a new microactuator that combines the thermal bimorph principle and the piezocantilever microactuator. In fact, temperature has been considered as external disturbance to be rejected for piezoelectric actuators [14], while in this paper, we will show that it can be used as a benefit. The proposed microactuator, called hybrid thermo-piezoelectric, will benefit the high range of displacement from the thermal bimorph and the high resolution from the piezocantilever.…”
Section: Introductionmentioning
confidence: 92%
“…In this paper, we propose a new microactuator that combines the thermal bimorph principle and the piezocantilever microactuator. In fact, temperature has been considered as external disturbance to be rejected for piezoelectric actuators [14], while in this paper, we will show that it can be used as a benefit. The proposed microactuator, called hybrid thermo-piezoelectric, will benefit the high range of displacement from the thermal bimorph and the high resolution from the piezocantilever.…”
Section: Introductionmentioning
confidence: 92%
“…Unfortunately, the performance of piezoelectric materials is quite sensitive to temperature. Changes in temperature result in expansion of the piezoelectric material and influence the material's parameters [28]. The former is referred to as the thermomechanical effect, and the latter causes the nonlinearities of hysteresis and creep to be temperature-dependent [29]- [31].…”
Section: Introductionmentioning
confidence: 99%
“…In many applications, the thermal effect on piezoelectric actuators has been considered as unwanted disturbance that drastically decreases the accuracy. Therefore, the literature proposes suitable controllers for rejecting it [15] [16]. In this paper, we propose to combine the thermal effect and the piezoelectricity to develop a new actuation concept, called hybrid thermo-piezoelectric.…”
Section: Introductionmentioning
confidence: 99%