2010 IEEE International Conference on Robotics and Automation 2010
DOI: 10.1109/robot.2010.5509922
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Principle, characterization and control of a new hybrid thermo-piezoelectric microactuator

Abstract: This paper presents a new actuator based on a unimorph piezocantilever and on the thermal bimorph principle, called hybrid thermopiezoelectric actuator. The main advantage of the proposed actuator is the high range of positioning from the thermal actuation and the high resolution and bandwidth from the piezoelectric one. A characterization and linear modeling are proposed. Finally, we propose an adapted control law to manage the two possible actuation types.

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Cited by 3 publications
(7 citation statements)
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“…The microgripper was capable of producing a jaw aperture between 98.4 and 71.8 lm with applied current of 0.32-0.84 A respectively, although the writers stated that a larger gap would be achievable by improving the gripper design, however it was not stated what improvement would be implemented. To incorporate the high range capabilities of an electro-thermal actuator, but also utilize the high speed and precision accuracy of a piezoelectric actuator, a hybrid actuator microgripper has been previously fabricated (Rakotondrabe and Ivan 2010). The structure of the arm used a dual layer cantilever comprising of a piezoelectric layer and a passive layer.…”
Section: Electro-thermal Microgrippermentioning
confidence: 99%
“…The microgripper was capable of producing a jaw aperture between 98.4 and 71.8 lm with applied current of 0.32-0.84 A respectively, although the writers stated that a larger gap would be achievable by improving the gripper design, however it was not stated what improvement would be implemented. To incorporate the high range capabilities of an electro-thermal actuator, but also utilize the high speed and precision accuracy of a piezoelectric actuator, a hybrid actuator microgripper has been previously fabricated (Rakotondrabe and Ivan 2010). The structure of the arm used a dual layer cantilever comprising of a piezoelectric layer and a passive layer.…”
Section: Electro-thermal Microgrippermentioning
confidence: 99%
“…The principle and the development of the new microgripper are detailed in this section. In order to reach the high range and high resolution, the thermo-piezoelectric actuator presented in the previous work [20] is used for each cantilever. The principle of one hybrid thermo-piezoelectric cantilever is, therefore, introduced.…”
Section: Development Of a New Hybrid Thermo-piezoelectric Microgrmentioning
confidence: 99%
“…In addition, this approach proposes a lower accuracy due to the clearance and/or the eventual bad alignment of the assembled elementary systems. In [20], a compact design of microactuator was proposed. It is actuated in two ways: thermal actuation for the high range, and piezoelectric actuation for the high resolution.…”
Section: A Presentation Of the Hybrid Thermo-piezoelectric Cantilevermentioning
confidence: 99%
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