HAADF-STEM block-scanning strategy for local measurement of strain at the nanoscale

Prabhakara, Viveksharma; Jannis, Daen; Guzzinati, Giulio; Béché, Armand; Bender, Hugo; Verbeeck, Johan

doi:10.1016/j.ultramic.2020.113099

Cited by 5 publications

(5 citation statements)

References 41 publications

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“…The precision measured as the standard deviation of strain over the reference Si area on the two perpendicular lamellae under the same illumination conditions is 7 x 10 -4 for NBD and 9 x 10 -4 for Bessel. The precision measured for Bessel is lower in comparison to our previously reported values [44] and the variations can be attributed to the thickness of the sample under investigation, the electron dose used [45] for acquisition and hence the overall SNR (signal to noise ratio) of the dataset. Hence, a determination of optimal electron dose level prior to the measurement to get good SNR aids to achieve the best possible precision depending on thickness of the sample of interest.…”

Section: Figure 9 Relative Intensity Distribution Of Electric Field C...contrasting

confidence: 81%

Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy

Prabhakara

Nuytten²,

Bender³

et al. 2021

Opt. Express

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Strain engineering in semiconductor transistor devices has become vital in the semiconductor industry due to the ever increasing need for performance enhancement at the nanoscale. Raman spectroscopy is a non-invasive measurement technique with high sensitivity to mechanical stress that does not require any special sample preparation procedures in comparison to characterization involving transmission electron microscopy (TEM), making it suitable for inline strain measurement in the semiconductor industry. Indeed at present, strain measurements using Raman spectroscopy are already routinely carried out in semiconductor devices as it is cost effective, fast and non-destructive. In this paper we explore the usage of linearised-radially polarised light as an excitation source, which does provide significantly enhanced accuracy and precision as compared to linearly polarised light for this application. Numerical simulations are done to quantitatively evaluate the electric field intensities that contribute to this enhanced sensitivity. We benchmark the experimental results against TEM diffraction-based techniques like nano-beam diffraction and Bessel diffraction. Differences between both approaches are assigned to strain relaxation due to sample thinning required in TEM setups, demonstrating the benefit of Raman for nondestructive inline testing.

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Section: Figure 9 Relative Intensity Distribution Of Electric Field C...contrasting

confidence: 81%

Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy

Prabhakara

Nuytten²,

Bender³

et al. 2021

Opt. Express

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“…For example, hexagonal lattice could be applied in the examples of Si 3 N 4 and aquamarine, where rhombohedral unit cell doesn't have to be transformed to Cartesian grid to form a square‐symmetry as in the present case. [ 97,98 ] In addition, the scanning grid can be a modulated pattern [ 104,105 ] or even nonperiodic pattern such as incommensurate scan or spiral scan (illustrated in Figure 10f,g). [ 106 ] Therefore, the beating of lattice with different scanning symmetry or defocused/overfocused beam (illustrated in Figure 10h) can be an interesting topic to investigate and to further retrieve structural information.…”

Section: Perspectivementioning

confidence: 99%

“…Artifacts such as image distortions, scanning jitter, or scanning noise are commonly observed in STEM‐based imaging. [ 105,107,108 ] These problems can be improved either with the development of the hardware of electron microscope, specially designed scanning strategies, or postimaging corrections. [ 105,109–111 ] We note that the stable STEM imaging not only lies on the stable microscope but also on the minimized interaction between electron beam and TEM specimen.…”

Section: Perspectivementioning

confidence: 99%

“…[ 105,107,108 ] These problems can be improved either with the development of the hardware of electron microscope, specially designed scanning strategies, or postimaging corrections. [ 105,109–111 ] We note that the stable STEM imaging not only lies on the stable microscope but also on the minimized interaction between electron beam and TEM specimen. For example, the electric charging may cause specimen drifting.…”

Section: Perspectivementioning

confidence: 99%

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Moiré Fringe Method via Scanning Transmission Electron Microscopy

Zhang

Zhao

et al. 2021

Small Methods

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Moiré fringe, originated from the beating of two sets of lattices, is a commonly observed phenomenon in physics, optics, and materials science. Recently, a new method of creating moiré fringe via scanning transmission electron microscopy (STEM) has been developed to image materials’ structures at a large field of view. Moreover, this method shows great advantages in studying atomic structures of beam sensitive materials by significantly reduced electron dose. Here, the development of the STEM moiré fringe (STEM‐MF) method is reviewed. The authors first introduce the theory of STEM‐MF and then discuss the advances of this technique in combination with geometric phase analysis, annular bright field imaging, energy dispersive X‐ray spectroscopy, and electron energy loss spectroscopy. Applications of STEM‐MF on strain, defects, 2D materials, and beam‐sensitive materials are further summarized. Finally, the authors′ perspectives on the future directions of STEM‐MF are presented.

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“…The third approach includes several sparse data collection methods which require subsequent reconstruction by inpainting algorithms 14 ; their effective acquisition time is directly related to the amount of pixels acquired.Various methodologies produce the required random pixel-sampling required for sparse data image reconstruction, and although all of them can help reducing dose, some offer no benefits on the overall speed. In the case of experiments on block-scanning strategies, time is invested into relocating the electron probe, while the overall acquisition could be prone to data overlap and mismatch 15 . Regarding the addition of a fast beam-blanking system, to avoid collecting some pixels, it takes the same time as a standard full frame image 16 .…”

Section: Introductionmentioning

confidence: 99%

High temporal-resolution scanning transmission electron microscopy using sparse-serpentine scan pathways

Ortega

Nicholls

Browning

et al. 2021

Sci Rep

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Scanning transmission electron microscopy (STEM) provides structural analysis with sub-angstrom resolution. But the pixel-by-pixel scanning process is a limiting factor in acquiring high-speed data. Different strategies have been implemented to increase scanning speeds while at the same time minimizing beam damage via optimizing the scanning strategy. Here, we achieve the highest possible scanning speed by eliminating the image acquisition dead time induced by the beam flyback time combined with reducing the amount of scanning pixels via sparse imaging. A calibration procedure was developed to compensate for the hysteresis of the magnetic scan coils. A combination of sparse and serpentine scanning routines was tested for a crystalline thin film, gold nanoparticles, and in an in-situ liquid phase STEM experiment. Frame rates of 92, 23 and 5.8 s-1 were achieved for images of a width of 128, 256, and 512 pixels, respectively. The methods described here can be applied to single-particle tracking and analysis of radiation sensitive materials.

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HAADF-STEM block-scanning strategy for local measurement of strain at the nanoscale

Cited by 5 publications

References 41 publications

Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy

Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy

Moiré Fringe Method via Scanning Transmission Electron Microscopy

High temporal-resolution scanning transmission electron microscopy using sparse-serpentine scan pathways

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