A hairpin bandpass filter with compact feeder structure is proposed for terahertz (THz) applications by using the model of odd-even propagation mode. By employing the three-dimensional integrated through-silicon via (TSV) technology, the proposed filter exhibits an ultra-compact size of only 0.24 × 0.028 mm 2 (1.38 × 0.16 λg 2 ). The model of the proposed filter is established and optimized with the HFSS tool based on finite element method. The results of S-parameters reveal that the proposed filter with center frequency at 0.5 THz, exhibits a bandwidth of 0.08 THz with insertion loss of 1.5 dB and reflection loss over 13.4 dB in the passband.INDEX TERMS hairpin bandpass filter, terahertz applications, odd-even model, through-silicon via (TSV).