Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

Wasisto, Hutomo Suryo; Merzsch, Stephan; Uhde, Erik; Waag, A.; Peiner, Erwin

doi:10.1016/j.mee.2015.03.037

Cited by 64 publications

(76 citation statements)

References 22 publications

(42 reference statements)

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“…Meander-type springs in combination with bending springs are well suited to take up the lateral strain, which increases with the deflection of the probing body and are thus able to provide a large linear range of the micro force artifact. Samples of this artifact, which were realized using reactive ion etching (RIE) at cryogenic temperature in silicon, confirm the load-deflection behavior derived from finite element modeling (FEM; Hamdana et al, 2016;Wasisto et al, 2015a). For an application under industrial conditions the micro force artifact comprises a strain-sensing piezoresistive Wheatstone bridge (WB) of very low cross-sensitivity to non-constant ambient conditions such as temperature, humidity and light.…”

Section: Introductionmentioning

confidence: 57%

Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

Hamdana

Bertke

Doering

et al. 2017

J. Sens. Sens. Syst.

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Abstract.A developed transferable micro force sensor was evaluated by comparing its response with an industrially manufactured device. In order to pre-identify sensor properties, three-dimensional (3-D) sensor models were simulated with a vertically applied force up to 1000 µN. Then, controllable batch fabrication was performed by alternately utilizing inductively coupled plasma (ICP) reactive ion etching (RIE) and photolithography. The assessments of sensor performance were based on sensor linearity, stiffness and sensitivity. Analysis of the device properties revealed that combination of a modest stiffness value (i.e., (8.19 ± 0.07) N m −1 ) and high sensitivity (i.e., (15.34 ± 0.14) V N −1 ) at different probing position can be realized using a meander-spring configuration. Furthermore, lower noise voltage is obtained using a double-layer silicon on insulator (DL-SOI) as basic material to ensure high reliability and an excellent performance of the sensor.

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Section: Introductionmentioning

confidence: 57%

Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

Hamdana

Bertke

Doering

et al. 2017

J. Sens. Sens. Syst.

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“…The large particles follow into the middle channel (10) owing to their large inertia. Accordingly, because of small inertia, the small particles, namely PM 2.5 , follow into the left channel (8) and right channel (9) equally. When the PM 2.5 flows through the TP in the channel (9), particles are captured on the surface of the SAW sensor chip by thermophoretic force.…”

Section: Design and Simulationmentioning

confidence: 99%

“…At present, the main methods for PM 2.5 monitoring are the gravimetric method, the β-ray decay method and the tapered element oscillating microbalance (TEOM) method [5], which suffer from large volume and high price. On the other hand, for portable purposes, the light scattering method, the micro electro mechanical systems (MEMS) method and some novel detecting approaches [6][7][8][9] are reported. Besides, to realize better sensitivity for mass sensors, high-frequency and high-Q aluminum nitride Lamb wave resonators were also developed recently [10,11].…”

Section: Introductionmentioning

confidence: 99%

A Novel Particulate Matter 2.5 Sensor Based on Surface Acoustic Wave Technology

Liu

Hao²,

Liu

et al. 2018

Applied Sciences

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Design, fabrication and experiments of a miniature particulate matter (PM) 2.5 sensor based on the surface acoustic wave (SAW) technology were proposed. The sensor contains a virtual impactor (VI) for particle separation, a thermophoretic precipitator (TP) for PM 2.5 capture and a SAW sensor chip for PM 2.5 mass detection. The separation performance of the VI was evaluated by using the finite element method (FEM) model and the PM 2.5 deposition characteristic in the TP was obtained by analyzing the thermophoretic theory. Employing the coupling-of-modes (COM) model, a low loss and high-quality SAW resonator was designed. By virtue of the micro electro mechanical system (MEMS) technology and semiconductor technology, the SAW based PM 2.5 sensor detecting probe was fabricated. Then, combining a dual-port SAW oscillator and an air sampler, the experimental platform was set up. Exposing the PM 2.5 sensor to the polystyrene latex (PSL) particles in a chamber, the sensor performance was evaluated. The results show that by detecting the PSL particles with a certain diameter of 2 µm, the response of the SAW based PM 2.5 sensor is linear, and in accordance with the response of the light scattering based PM 2.5 monitor. The developed SAW based PM 2.5 sensor has great potential for the application of airborne particle detection.

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“…Differentiating from the other micro-/nanoelectromechanical resonant devices that are typically based on piezoresistive or piezoelectric transduction sensing mechanisms (e.g., silicon cantilevers [2][3][4] and vertical nanowire resonators [5,6]), this work shows an approach to design and fabricate microresonators based on the giant enhanced photon-phonon interaction, so-called Brillouin effect, which occurs in sub-wavelength waveguides [7].…”

Section: Introductionmentioning

confidence: 99%

Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection

et al. 2019

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A silicon photonic microresonator comprising two curved vertical grating couplers and a single suspended Si nanowaveguide (NWG) is developed to investigate the giant enhanced Brillouin scattering in subwavelength NWGs caused by photon-phonon interaction. Finite element modelling based on COMSOL Multiphysics is conducted to optimize the critical device parameters (e.g., waveguide width, height, and length). As the smallest structures that need to be resolved are down to ~15 nm in size, electron-beam nanolithography is employed. In this case, dosage tests are carried out to minimize proximity charging effects during the nanopatterning of the silicon-on-insulator (SOI) surface, resulting in appropriate adaptive current area dosage distributions for the periodic gratings, couplers peripheral areas, and NWG, respectively. Furthermore, an enhanced inductively coupled plasma dry reactive ion etching (ICP-DRIE) process at a cryogenic temperature is used to realize smooth vertical sidewalls. Finally, buffered hydrofluoric acid (BHF)-based wet chemical etching is carried out to remove the buried oxide resulting in a suspended Si waveguide.

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Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

Cited by 64 publications

References 22 publications

Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

A Novel Particulate Matter 2.5 Sensor Based on Surface Acoustic Wave Technology

Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection

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