Hard x-ray phase zone plate fabricated by lithographic techniques

Lai, Barry; Yun, Wenbing; Legnini, D.; Xiao, Yanan; Chrzas, J.; Viccaro, P.J.; White, Victor; Bajikar, Sateesh S.; Denton, Denice D.; Cerrina, F.; Fabrizio, E. Di; Gentili, M.; Grella, L.; Baciocchi, M.

doi:10.1063/1.108400

Cited by 127 publications

(53 citation statements)

References 12 publications

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“…For testing the resolution of the new microscope we have imaged a Fresnel zone plate (Lai et al, 1992) with 169 zones made of gold (1X15 mm thick on a Si 3 N 4 substrate of 0.1 mm thickness). The outermost zones had a width of 0.3 mm.…”

Section: Comparison With the Experimentsmentioning

confidence: 99%

“…While microanalysis requires devices which generate a small focal spot, X-ray microscopy calls for high-quality imaging components. Up to now, curved mirrors (Kirkpatrick & Baez, 1948;Suzuki & Uchida, 1992) and multilayers (Underwood et al, 1986(Underwood et al, , 1988, single and multiple capillaries Hoffman et al, 1994) and diffracting lenses (Aristov et al, 1986;Lai et al, 1992; are the standard means of generating a small focal spot. Some of these devices are suited for imaging (Underwood, 1986;Tarazona et al, 1994;Hartman et al, 1995;Snigirev et al, 1997;Yun et al, 1998).…”

Section: Introductionmentioning

confidence: 99%

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Imaging by parabolic refractive lenses in the hard X-ray range

et al. 1999

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The manufacture and properties of compound refractive lenses (CRLs) for hard X-rays with parabolic pro®le are described. These novel lenses can be used up to $60 keV. A typical focal length is 1 m. They have a geometrical aperture of 1 mm and are best adapted to undulator beams at synchrotron radiation sources. The transmission ranges from a few % in aluminium CRLs up to about 30% expected in beryllium CRLs. The gain (ratio of the intensity in the focal spot relative to the intensity behind a pinhole of equal size) is larger than 100 for aluminium and larger than 1000 for beryllium CRLs. Due to their parabolic pro®le they are free of spherical aberration and are genuine imaging devices. The theory for imaging an X-ray source and an object illuminated by it has been developed, including the effects of attenuation (photoabsorption and Compton scattering) and of the roughness at the lens surface. Excellent agreement between theory and experiment has been found. With aluminium CRLs a lateral resolution in imaging of 0.3 mm has been achieved and a resolution below 0.1 mm can be expected for beryllium CRLs. The main ®elds of application of the refractive X-ray lenses are (i) microanalysis with a beam in the micrometre range for diffraction,¯uorescence, absorption, scattering; (ii) imaging in absorption and phase contrast of opaque objects which cannot tolerate sample preparation; (iii) coherent X-ray scattering.

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Section: Comparison With the Experimentsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Imaging by parabolic refractive lenses in the hard X-ray range

et al. 1999

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“…We conducted experiments on the 2-ID-D undulator beamline of APS 17,18 using FZP as focusing elements for measuring strain distribution on Al-Cu interconnects. The zone plates were manufactured at the Center for X-ray Lithography by x-ray replication and Au electroplating techniques.…”

Section: Methodsmentioning

confidence: 99%

Measurement of strain in Al–Cu interconnect lines with x-ray microdiffraction

Solak

Vladimirsky

Cerrina

et al. 1999

Journal of Applied Physics

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We report measurement of strain in patterned Al-Cu interconnect lines with x-ray microdiffraction technique with a ϳ1 m spatial resolution. Monochromatized x rays from an undulator were focused on the sample using a phase fresnel zone plate and diffracted light was collected by an area detector in a symmetric, angle dispersive x-ray diffraction geometry. Measurements were made before and after the line sample was stressed for electromigration. Results show an increase in interand intra-grain strain variation after the testing. Differences in strain behavior of grains with ͑111͒ and ͑200͒ crystallographic planes parallel to the substrate surface were observed. A position dependent variation of strain after the testing was measured whereas no such dependence was found before the testing.

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“…The use of zone plates for the focusing of X-rays is well established in the synchrotron community, especially in the soft X-ray microscopy community (Lai et al, 1992;Kirz, Jacobsen & Howells, 1995). A zone plate is a structure composed of alternating concentric rings of two materials with different (complex) refractive indices.…”

Section: Phase-zone Platesmentioning

confidence: 99%

X-ray Optics Developments at the APS for the Third Generation of High-Energy Synchrotron Radiation Sources

1997

J Synchrotron Radiat

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Third-generation hard-X-ray synchrotron radiation sources simultaneously provide both a need and an opportunity for the development of new short-wavelength optical components. The high power and power densities of the insertion-device-produced X-ray beams have forced researchers to consider what may seem like exotic approaches, such as cryogenically cooled silicon and highly perfect diamond crystals, to mitigate thermal distortions in the first optical components. Once the power has been successfully filtered while maintaining the high beam brilliance, additional specialized optical components can be inserted into the monochromatic beam that take advantage of that brilliance. This paper reviews the performance of such optical components that have been designed, fabricated and tested at the Advanced Photon Source, starting with high-heat-load components and followed by examples of several specialized devices, such as an meV resolution (in-line) monochromator, a high-energy X-ray phase retarder and a phase-zone plate with submicrometer focusing capability.

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Hard x-ray phase zone plate fabricated by lithographic techniques

Cited by 127 publications

References 12 publications

Imaging by parabolic refractive lenses in the hard X-ray range

Imaging by parabolic refractive lenses in the hard X-ray range

Measurement of strain in Al–Cu interconnect lines with x-ray microdiffraction

X-ray Optics Developments at the APS for the Third Generation of High-Energy Synchrotron Radiation Sources

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