Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses

Abstract

We report scanning hard x-ray imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together. With optics pre-characterization and accurate control of the bonding process, we show that a common focal plane for both MLLs can be realized at 9.317 keV. Using bonded MLLs, we obtained a scanning transmission image of a star test pattern with a resolution of 50 × 50 nm². By applying a ptychography algorithm, we obtained a probe size of 17 × 38 nm² and an object image with a resolution of 13 × 13 nm². The significant reduction in alignment complexity for bonded MLLs will greatly extend the application range in both scanning and full-field x-ray microscopies.

Multi-slice ptychography with large numerical aperture multilayer Laue lenses

“…In the hard x-ray regime, the multilayer Laue lens (MLL) has been proposed as a volume diffractive optics alternative to Fresnel zone plate to produce sub-10 nm focus with high efficiency [10,11]. Since its first demonstration [12], the achieved focus size has been steadily improved to sub-10 nm scale with flat or wedged MLLs [13][14][15][16][17][18][19]. Integrating scanning probe microscopy with ptychography gains accumulating popularity for its multi-modality imaging capability with high spatial resolution [20][21][22].…”

Microscopy Instrumentation and Nanopositioning at NSLS-II: Current Status and Future Directions

“…At NSLS-II, the microscopy instrumentation and nano-positioning program aims to develop state-of-the-art instrumentation to support a broad range of scientific studies. For MLL nano-focusing optics, a concept of bonding two individual lenses together, yielding a monolithic 2D focusing element, has been explored [22, 23]. A novel Micro Electro Mechanical Systems (MEMS) approach has been considered and applied for alignment and manipulation of individual lenses.…”

Multilayer Laue lenses at high X-ray energies: performance and applications

“…In the past, several successful demonstrations of the use of MLLs for projection microscopy were made at X-ray energies of 9 to 12 keV [45,46], and one previous study was performed on direct imaging using MLLs [35]. In this section, we demonstrate the use of the MLLs for magnified direct bright-field imaging as illustrated in Fig.…”