Helium field ion source for application in a 100 keV focused ion beam system

Sakata, T.; Kumagai, K.; Naitou, Motohiro; Watanabe, Ichiro; Ohhashi, Yuu; Hosoda, Osamu; Kokubo, Y.; Tanaka, Kazumitsu

doi:10.1116/1.585970

Cited by 4 publications

(1 citation statement)

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“…[d] (Sakata et al, 1992): Current was measured through microchannel plate using predetermined calibration. Determination of solid angle was not discussed.…”

Section: Methodsmentioning

confidence: 99%

Evaluating Angular Ion Current Density for Atomically Defined Nanotips

2014

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In this paper we investigate methods to characterize angular current density from atomically defined gas field ion sources. We show that the ion beam emitted from a single apex atom is described by a two-dimensional Gaussian profile. Owing to the Gaussian shape of the beam and the requirement to collect the majority of the ion current, fixed apertures have inhomogeneous illumination. Therefore, angular current density measurements through a fixed aperture record averaged angular current density. This makes comparison of data difficult as averaged angular current density depends on aperture size. For the same reasons, voltage normalization cannot be performed for fixed aperture measurements except for aperture sizes that are infinitely small. Consistent determination of angular current density and voltage normalization, however, can be achieved if the beam diameter as well as total ion current are known. In cases where beam profile cannot be directly imaged with a field ion microscope, the beam profile could be extracted from measurements taken at multiple acceleration voltages and/or with multiple aperture sizes.

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“…[d] (Sakata et al, 1992): Current was measured through microchannel plate using predetermined calibration. Determination of solid angle was not discussed.…”

Section: Methodsmentioning

confidence: 99%

Evaluating Angular Ion Current Density for Atomically Defined Nanotips

2014

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Single Atom Gas Field Ion Sources for Scanning Ion Microscopy

Urban

Wolkow

Pitters³

2016

NanoScience and Technology

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Determination of the spring constants of probes for force microscopy/spectroscopy

1996

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A direct, accurate and convenient procedure for calibrating the spring constants of probes used for force microscopy/spectroscopy is described. It amounts to deflecting an `unknown' cantilever with a `standard' lever, where the standard lever has been precalibrated. The absolute and relative accuracies of the procedure are - 30% and - 20%, respectively; the former is limited by uncertainties in the determination of the spring constant for the `standard' lever, as well as that for the `unknown'. The method differs from others of the static deflection variety by its exploitation of the routine features of current instruments. The technique is compared with other static and dynamic methods currently being used.

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Helium field ion source for application in a 100 keV focused ion beam system

Cited by 4 publications

References 0 publications

Evaluating Angular Ion Current Density for Atomically Defined Nanotips

Evaluating Angular Ion Current Density for Atomically Defined Nanotips

Single Atom Gas Field Ion Sources for Scanning Ion Microscopy

Determination of the spring constants of probes for force microscopy/spectroscopy

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