2006 Optical Fiber Communication Conference and the National Fiber Optic Engineers Conference 2006
DOI: 10.1109/ofc.2006.215562
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Helium implanted silicon waveguide photodetectors for optical power monitors

Y. Liu
1
,
Chi‐Wai Chow
2
,
W. Y. Cheung
3
et al.

Abstract: The enhanced photo-response of helium ion implanted silicon waveguides as a function of different anneal temperatures and durations is reported. The enhancement in responsivity at communication wavelength was sufficient for use as optical power monitors.

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