Infrared Sensors, Devices, and Applications X 2020
DOI: 10.1117/12.2568741
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Heteroepitaxial integration of InAs/InAsSb type-II superlattice barrier photodetectors onto silicon

Abstract: GaSb-based materials can be used to produce high performance photonic devices operating in the technologically important mid-infrared spectral range. Direct epitaxial growth of GaSb on silicon (Si) is an attractive method to reduce manufacturing costs and opens the possibility of new applications, such as lab-on-a-chip MIR photonic integrated circuits and monolithic integration of focal plane arrays (FPAs) with Si readout integrated circuits (ROICs). However, fundamental material dissimilarities, such as the l… Show more

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Cited by 3 publications
(6 citation statements)
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“…Targeting applications in the near-infrared, telecom, and mid-infrared bands, GaAs, InP, and GaSb thin films have all been successfully grown on Si wafers without APBs. Due to the difference in lattice mismatch and growth dynamics, the TD density of GaAs/Si thin film has been reduced to 10 6 cm −2 , while that of InP/Si and GaSb/Si are in the order of 10 8 cm −2 and 10 7 cm −2 , respectively [32][33][34]. Figure 1 lists the basic parameters of III-V PDs grown on Si based on GaAs, InP, and GaSb material platforms.…”
Section: Blanket Heteroepitaxy Of Iii-v Pds On Simentioning
confidence: 99%
See 1 more Smart Citation
“…Targeting applications in the near-infrared, telecom, and mid-infrared bands, GaAs, InP, and GaSb thin films have all been successfully grown on Si wafers without APBs. Due to the difference in lattice mismatch and growth dynamics, the TD density of GaAs/Si thin film has been reduced to 10 6 cm −2 , while that of InP/Si and GaSb/Si are in the order of 10 8 cm −2 and 10 7 cm −2 , respectively [32][33][34]. Figure 1 lists the basic parameters of III-V PDs grown on Si based on GaAs, InP, and GaSb material platforms.…”
Section: Blanket Heteroepitaxy Of Iii-v Pds On Simentioning
confidence: 99%
“…Reprinted with permission from Ref. [34]. Copyright 2020, Society of Photo-Optical Instrumentation Engineers (SPIE).…”
Section: Blanket Heteroepitaxy Of Iii-v Pds On Simentioning
confidence: 99%
“…R d A product is the dynamic resistance‐area product that is used for barrier detectors where an applied bias is required to achieve proper responsivity. Figure compares the R d A product to “Rule 07” for barrier and nonbarrier PDs based on Ga‐free [ 163–165,238 ] and Ga‐containing [ 68,112,174,182,239 ] T2SL at HOT of 300 K in the MWIR spectral range. Generally, it can be seen that the RA performance of T2SL PDs is approaching the performance level of the current state‐of‐the‐art MCT detectors.…”
Section: Optical and Electrical Performance Of Pdsmentioning
confidence: 99%
“…Generally, it can be seen that the RA performance of T2SL PDs is approaching the performance level of the current state‐of‐the‐art MCT detectors. It is seen that the best RA product is achieved using a barrier‐based Ga‐free T2SL PD, [ 163,238 ] with a cut‐off wavelength of 5.8 μm under an applied bias of 200 mV, which slightly exceeds the MCT's “Rule 07” at 300 K.In contrast, the RA performance of nonbarriers Ga‐based T2SL [ 68,112,182 ] is lower than that of barrier detectors and it is roughly less than an order of magnitude compared to “Rule 07.”…”
Section: Optical and Electrical Performance Of Pdsmentioning
confidence: 99%
“…Superlattice (SL) is a periodic heterostructure of two or more alternating layers whose bandgap can be engineered by changing the thickness of the constituent layers. Type-II superlattice (T2SL) is emerging as a popular material for photodetectors (PDs), photodiodes, avalanche photodetectors (APDs), , light-emitting diodes (LEDs), , lasers, and phototransistors. , Due to its advantages, such as suppressed Auger recombination, , reduced tunneling current, and the flexibility of incorporating unipolar barriers, T2SL-based devices are theoretically expected to achieve higher performance levels than MCT detectors. , …”
Section: Introductionmentioning
confidence: 99%