2019
DOI: 10.1109/access.2019.2902246
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Heterojunction Diode Shielded SiC Split-Gate Trench MOSFET With Optimized Reverse Recovery Characteristic and Low Switching Loss

Abstract: A split-gate SiC trench MOSFET with a hetero-junction diode (HJD) is proposed and numerically analyzed in this paper. The proposed structure features the HJD to effectively suppress the turn-on of the parasitic body diode and reduce the depletion region in the JFET area. A P+ shielding layer surrounding the HJD and the gate oxide layer is used to alleviate the concentration of the electric field under the gate trench and improve the switching performance. As a result, not only the breakdown voltage is increase… Show more

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Cited by 30 publications
(15 citation statements)
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“…Also, the current measured at the place proximity to the gate has been 49.5 % less than the edge for V d = 0.7 V. The current at the edge of the device is measured and it has to be maintained high to ensure high electron mobility in the CSDG MOSFET structure [31][32][33]. The energy stored in the cylindrical capacitor inside the CSDG MOSFET, as shown in (3), constitutes the most significant factor for the mobility of electrons in the channel [15,34].…”
Section: Electron Density Profile Of Csdg Mosfetsmentioning
confidence: 99%
“…Also, the current measured at the place proximity to the gate has been 49.5 % less than the edge for V d = 0.7 V. The current at the edge of the device is measured and it has to be maintained high to ensure high electron mobility in the CSDG MOSFET structure [31][32][33]. The energy stored in the cylindrical capacitor inside the CSDG MOSFET, as shown in (3), constitutes the most significant factor for the mobility of electrons in the channel [15,34].…”
Section: Electron Density Profile Of Csdg Mosfetsmentioning
confidence: 99%
“…The drain current models were established in recent works in the nanometer regime [7][8][9][10][11], which concentrates only on the long channel models [5,12]. Hence, capacitance modeling with good accuracy of transconductance and electrical field in the cylindrical structure is essential for the accurate designing of CSDG MOSFETs.…”
Section: Introductionmentioning
confidence: 99%
“…Nevertheless, a large reverse leakage current can occur due to the image charge of the metal-semiconductor junction and contamination by the metal for the Schottky contact [14]. Recently, studies on embedded heterojunction body diode MOSFETs have been conducted, but high leakage current and low critical electric field of polysilicon make it difficult to operate at high voltage [15,16].…”
Section: Introductionmentioning
confidence: 99%