HfO&lt;inf&gt;2&lt;/inf&gt; inter-poly dielectric characteristics with interface fluorine passivation

Chen, Yung-Yu; Hsieh, Chih-Ren; Lu, Kwung-Wen; Lou, Jen‐Chung

doi:10.1109/edssc.2009.5394289

2009 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) 2009

DOI: 10.1109/edssc.2009.5394289

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HfO<inf>2</inf> inter-poly dielectric characteristics with interface fluorine passivation

Yung-Yu Chen

Chih-Ren Hsieh

Kwung-Wen Lu

et al.

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HfO<inf>2</inf> inter-poly dielectric characteristics with interface fluorine passivation

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References 8 publications

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