HfO<sub>2</sub>/SiO<sub>2</sub>multilayer based reflective and transmissive optics from the IR to the UV

Wang, Jue; Hart, Gary A.; Oudard, Jean Francois; Wamboldt, Leonard; Roy, Brian P.

doi:10.1117/12.2219752

Cited by 3 publications

(3 citation statements)

References 6 publications

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“…The material Al can support surface plasmonic resonance arranging from deep ultraviolet (DUV) to near-infrared (NIR) regions [25,26]. The material SiO 2 has the advantage of low loss in the DUV to the NIR wavelength [26,27]. The perfect absorption of 99.97% can be achieved in the Al/SiO 2 hybrid system at the wavelength of 304.4 nm.…”

Section: Introductionmentioning

confidence: 99%

Ultraviolet perfect absorption leveraging BICs in Al/SiO2 hybrid system

Wu,

Liu,

Zhu

et al. 2024

Preprint

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The bound states in the continuum (BICs), coupled resonance in non-Hermitian system, is typically manifested by a zero linewidth and an infinite resonance quality factor. These unique features facilitate various developments and applications in low-threshold lasers, ultrasensitive sensing, and highly efficient optoelectronics. Numerous research has been devoted to achieving perfect absorption leveraging BICs in the visible regime. For hybrid systems, it is a major issue to manipulate BICs in the ultraviolet regime. Moreover, there is currently a lack of achieving perfect absorption leveraging BICs in the ultraviolet regime. Here, a kind of Al/SiO2 hybrid system is theoretically proposed to realize perfect absorption by motivating various types of BICs in the ultraviolet regime. In this work, the perfect absorption of 99.97% can be achieved in the Al/SiO2 hybrid system at the wavelength of 304.4 nm. Importantly, the BICs can be modulated into the ultraviolet regime by adjusting the geometric parameters and the incident light angles, and the Q factor of 1099.4 can be successfully obtained. This work builds a theoretical foundation to realize the perfect absorption leveraging BICs for UV light detection.

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Section: Introductionmentioning

confidence: 99%

Ultraviolet perfect absorption leveraging BICs in Al/SiO2 hybrid system

Wu,

Liu,

Zhu

et al. 2024

Preprint

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“…Such bilayers are prospective due to a high melting point and a low intrinsic absorption [1]. The operating wavelengths of such coatings lie in the range of middle UV, visible and near IR radiation [4,5]. HfO 2 /SiO 2 polarizers for 1054 nm with low stresses are utilized in highlaser-damage-threshold coatings for the OMEGA laser system [6].…”

Section: Introductionmentioning

confidence: 99%

“…The best mirrors deposited on glass substrate had 3.5 TiO x /SiO 2 bilayers, 515 nm operating wavelength and 84% of maximum optical refection. Stresses in ZrO 2 /SiO 2 multilayers (with a period of [3][4][5][6][7][8][9] deposited by electron evaporation were under discussion also [9]. Residual stress was up to −300 MPa.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

et al. 2022

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This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayers were used as the basis of the reflective multilayers for the visible and UV ranges. A gas-dynamic response from the irradiated surfaces was studied with schlieren photography. The properties of original and irradiated multilayers were described with ultra violet visible infrared spectroscopy (UV-Vis-IR), X-ray diffraction (XRD), X-ray reflectometry, scanning electron microscopy (SEM) and other techniques. Data on the degradation of optical properties and surface morphology were obtained.

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Plasma-ion-assisted deposition of HfO2 films with low UV absorption

Deng

Jin

Chun

et al. 2020

Surface and Coatings Technology

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HfO₂/SiO₂multilayer based reflective and transmissive optics from the IR to the UV

Cited by 3 publications

References 6 publications

Ultraviolet perfect absorption leveraging BICs in Al/SiO2 hybrid system

Ultraviolet perfect absorption leveraging BICs in Al/SiO2 hybrid system

Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

Plasma-ion-assisted deposition of HfO2 films with low UV absorption

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HfO2/SiO2multilayer based reflective and transmissive optics from the IR to the UV

Cited by 3 publications

References 6 publications

Ultraviolet perfect absorption leveraging BICs in Al/SiO2 hybrid system

Ultraviolet perfect absorption leveraging BICs in Al/SiO2 hybrid system

Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

Plasma-ion-assisted deposition of HfO2 films with low UV absorption

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Product

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HfO₂/SiO₂multilayer based reflective and transmissive optics from the IR to the UV