High Accuracy, High Temperature Pressure Probes for Aerodynamic Testing

Ned, A.A.; Goodman, Scott; Carter, Steve; Afb, Arnold

doi:10.2514/6.2011-1201

Cited by 3 publications

(2 citation statements)

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“…Among them, long pressure line measurement leads to pressure loss and long response times. The piezoresistive sensors [8] on the probe surface affect the accuracy of the measurement results due to the introduction of new heat sources by the sensor. Compared with electronic pressure sensors, fiber-optic pressure sensors have the advantages of small size, anti-electromagnetic interference, high-temperature resistance [9,10], and high sensitivity [11], which can improve measurement accuracy.…”

Section: Introductionmentioning

confidence: 99%

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Song,

Ma,

Zhao

et al. 2024

Micromachines

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The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber optic sensing. The pressure-sensitive detection unit utilizes silicon-glass anodic bonding to achieve the integrated and batch-producible manufacturing of five pressure-sensitive Fabry–Perot (FP) cavities. The probe structure and parameters of the sensitive unit were optimized based on fluid and mechanical simulations. The non-scanning correlation demodulation technology was applied to extract specific cavity lengths from multiple interference surfaces. The sealing platform was established to analyze the sealing performance of the five-hole probe and the pressure-sensitive detection unit. The testing platform was established to test the pressure response characteristics of the probe. Experimental results indicate that the probe has good sealing performance between different air passages, making it suitable for detecting pressure from multiple directions. The pressure responses are linear within the range of 0–250 kPa, with the average pressure sensitivity of the five sensors ranging from 11.061 to 11.546 nm/kPa. The maximum non-linear error is ≤1.083%.

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Section: Introductionmentioning

confidence: 99%

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Song,

Ma,

Zhao

et al. 2024

Micromachines

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show abstract

“…Insulating material is used as separator between piezoresistor and substrate for SOI mono-crystalline silicon pressure sensor. Kulite companies provided a SOI pressure sensor which can work at 480 o C [3]. By etching epitaxial silicon film on the insulating substrate sapphire, SOS pressure sensor can be …”

Section: Silicon Piezoresistormentioning

confidence: 99%

Development and Calibration of High Temperature Pressure Sensor

Tan¹

2017

dtcse

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Abstract. High temperature pressure sensors are widely used in petrochemical, aerospace, metallurgy, gas machine. According to the mechanism, the recent research on high temperature pressure sensors is reviewed. The comparison and analysis about working temperature and sensitivity among different pressure sensors are completed. High temperature pressure calibration system has less research, reasonable system design and calibration method is needed to further studies.

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A MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure Transducers

Zhou

Sheplak

2020

J. Microelectromech. Syst.

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High Accuracy, High Temperature Pressure Probes for Aerodynamic Testing

Cited by 3 publications

References 0 publications

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Development and Calibration of High Temperature Pressure Sensor

A MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure Transducers

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