High Detectivity Infrared Detectors Using Porous PZT Pyroelectric Thick Films

Abstract

The fabrication, electric properties and application of porous PbZr 0.3 Ti 0.7 O 3 (PZT) thick films are reported. The films were deposited on Pt coated Si substrates by electrophoresis deposition (EPD) using PZT nanoparticles and (001) single crystalline nanorods. Comparing with dense PZT films, the figure merit F v and F D of porous PZT films were 3.51×10-5 m 2 C-1 , 6.75×10-5 Pa-1/2 , improved by 58 and 57.5 %, respectively. The detectivity of porous PZT film infrared detectors was 1.0×10 9 cm Hz 1/2 W-1 at 40-100 Hz, which was much larger than commercial infrared detectors.

(001)-orientation single crystalline Pb(Zr0.3Ti0.7)O3pyroelectric nanorod array synthesized by hydrothermal reaction

“…[1][2][3] Pb(Zr 0.3 Ti 0.7 )O 3 (PZT) is a ferroelectric material that possesses a perovskite crystal structure and shows high potential application in piezoelectric and pyroelectric devices. [4][5][6][7][8][9] It was reported that piezoelectric and pyroelectric properties of PZT nanorod were still retained when its radial diameter was as small as 45 nm-2 µm.…”