High-efficiency fabrication of aspheric microlens arrays by holographic femtosecond laser-induced photopolymerization

Hu, Yanlei; Chen, Yuhang; Ma, Jianqiang; Li, Jiawen; Huang, Wenhao; Chu, Jiaru

doi:10.1063/1.4824307

Cited by 62 publications

(31 citation statements)

References 17 publications

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“…1b) and Fresnel lens with smooth surfaces were successfully fabricated with TPP method [53]. Similar efforts were reported by Hu et al [79] that aspheric microlens arrays were fabricated by holographic femtosecond laser-induced photopolymerization. Cojoca et al [80] demonstrated that various microstructures with good optical properties can be fabricated on the top of optical fibers, providing a competitive mean for on-fiber fabrication.…”

Section: Multiphoton Polymerizationsupporting

confidence: 62%

Femtosecond laser internal manufacturing of three-dimensional microstructure devices

Zheng

Chen

et al. 2015

Appl. Phys. A

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Potential applications for three-dimensional microstructure devices developed rapidly across numerous fields including microoptics, microfluidics, microelectromechanical systems, and biomedical devices. Benefiting from many unique fabricating advantages, internal manufacturing methods have become the dominant process for three-dimensional microstructure device manufacturing. This paper provides a brief review of the most common techniques of femtosecond laser three-dimensional internal manufacturing (3DIM). The physical mechanisms and representative experimental results of 3D manufacturing technologies based on multiphoton polymerization, laser modification, microexplosion and continuous hollow structure internal manufacturing are provided in details. The important progress in emerging applications based on the 3DIM technologies is introduced as well.

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Section: Multiphoton Polymerizationsupporting

confidence: 62%

Femtosecond laser internal manufacturing of three-dimensional microstructure devices

Zheng

Chen

et al. 2015

Appl. Phys. A

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“…[ 59,[69][70][71][72] Structures for micro-optical [ 71,72 ] (Figure 2 f) and biological [ 69 ] applications have been fabricated in parallel or using single-shot exposure. A number of groups have used SLMs to focus the incident energy to a multitude of foci.…”

Section: Progress Reportmentioning

confidence: 99%

Three‐Dimensional μ‐Printing: An Enabling Technology

Hohmann

Renner

Waller

et al. 2015

Advanced Optical Materials

155

102

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functional elements, chiral photonic crystals, photonic metamaterials and quasicrystals. With this technology becoming commercially available, [ 1 ] many novel ideas have been realized by scientists around the world. Some of these developments can already be seen as new research areas enabled by 3D µ-printing.Many excellent reviews of the underlying technology have recently been published, and we give here just a short selection. [2][3][4][5] With the present progress report we want to summarize the tremendous technological development during the last fi ve years as well as to give an overview over some vastly growing research fi elds enabled by this development. As the number of research papers based on 3D µ-printing as enabling technology is exploding, we intend to categorize the most recent developments to identify future research directions and possible novel fi elds for the years to come. Recent Technological Advances in 3D µ-PrintingFrom the fi rst proof-of-principle in 1997, [ 6 ] the µ-printing community has continuously been expanding the structuring capabilities of µ-printing systems overcoming limitations such as structuring speed, sample volume, complicated pre and post processing, as well as minimum feature size and resolution. Progress is made along two directions: First, extending the aforementioned benchmarks of µ-printing systems. Second, techniques that move µ-printed structures towards functional devices. These two directions obviously are intertwined and require interdisciplinary research efforts on new photocurable materials, complex light-matter interaction, reaction kinetics as well as processes on a molecular level infl uencing structure formation. The most infl uential technological advances are summarized in this section.Section 2.1. covers recent work leading to a tremendous increase of the capabilities of µ-printing systems. Section 2.2. describes superresolution concepts exploiting light-matter interactions to achieve smaller feature sizes and higher structural resolution. Section 2.3. reviews spatial light modulator (SLM) based laser lithography providing additional degrees of freedom by shaping the wavefront of the laser beam. Laser Sources, Scanning Devices, and Writing GeometryThe high complexity of ultrafast fs-lasers drives the community to look for alternative laser sources, leading to cost and In this progress report the development of three-dimensional µ-printing and its impact as an enabling technology onto different scientifi c fi elds is reviewed. Driven by direct laser writing via two-photon absorption, the technology has reached a level of maturity and ease of application such that 3D printing on the micrometer scale can now be considered. While the underlying technology is still developing towards higher resolution and increasing speed of fabrication, the last fi ve years have seen new fi elds rising that were obviously enabled by 3D µ-printing. Among the recent technological developments discussed in this progress report are the fi elds of super-resolution lithography ...

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“…This technique is particularly appealing for the fabrication of micro-optical and photonic devices [2][3][4][5][6] complying its several properties, such as (a) the resolution of polymerized voxels can be beyond the diffraction limit down to sub-100 nm due to the nonlinear nature of 2PP [7], (b) the surface roughness of microstructures fabricated by 2PP can be less than 2.5 nm [8], and (c) arbitrary shaped 3D microstructures can be fabricated by precisely overlapped voxels [9].…”

Section: Introductionmentioning

confidence: 99%

Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator

Yang

El-Tamer

Hinze

et al. 2015

Optics and Lasers in Engineering

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116

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High-efficiency fabrication of aspheric microlens arrays by holographic femtosecond laser-induced photopolymerization

Cited by 62 publications

References 17 publications

Femtosecond laser internal manufacturing of three-dimensional microstructure devices

Femtosecond laser internal manufacturing of three-dimensional microstructure devices

Three‐Dimensional μ‐Printing: An Enabling Technology

Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator

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