Abstract-Novel MMIC spiral inductors on GaN-on-lowresistivity silicon (LR-Si) substrates (σ < 40 · cm) are demonstrated with enhanced self-resonance frequency ( f SRF ) and Q-factor. The developed technology improves inductor performance by suppressing substrate coupling effects using air-bridge technology above benzocyclobutene dielectric as an interface layer on the lossy substrate. A 0.83-nH spiral inductor with peak Q-factor enhancement of 57% ( Q = 22 at 24 GHz) and maximum f SRF of 59 GHz was achieved because of the extra 5-μm elevation in air. An accurate broad-band model for the fabricated inductors has been developed and verified for further performance analysis up to 40 GHz. The proposed inductors utilize cost-effective, reliable, and MMIC-compatible technology for the realization of high-performance RF GaN-on-LR Si MMIC circuits for millimeter-wave applications.Index Terms-Benzocyclobutene (BCB), GaN-based highelectron-mobility transistors (HEMTs), high-Q Inductors, low-resistivity silicon substrates, millimeter wave.