High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers

Morimoto, Keiji; Kanno, Isaku; Wasa, Kiyotaka; Kotera, Hidetoshi

doi:10.1016/j.sna.2010.06.028

Cited by 146 publications

(83 citation statements)

References 18 publications

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“…Output voltage and generated power of transferred epitaxial lead zirconate titanate (PZT) thin fi lms on a stainless steel cantilever as a function of load resistance. 13 The maximum output power reached 5.3 μ W at the low acceleration of 5 m/s 2 due to the large electromechanical coupling factor k 31 of c -axis oriented PZT thin fi lms. membrane = 400 μ m), a peak power of 10 μ W was measured across 10 kΩ with a bias of 1 V and an acceleration of 0.01g.…”

Section: Lead-free Piezoelectric Fi Lmsmentioning

confidence: 96%

“…68 Morimoto et al developed high effi ciency piezoelectric energy harvesters using c -axis oriented PZT thin fi lms, which were transferred onto stainless steel. 13 The fabrication process from this study is shown in Figure 5 . The c -axis oriented PZT thin fi lms were grown on (100) MgO single crystals with epitaxial (001) Pt bottom electrodes.…”

Section: Grain Textured and Epitaxial Piezoelectric Fi Lmsmentioning

confidence: 99%

“…Because of the thin dimensions of the metal cantilever, the fi rst resonance was found to occur at 126 Hz. 13 Experimental peak-to-peak voltage, and experimental and calculated averaged output power are plotted in Figure 6 (acceleration: 5 m/s 2 ). A maximum output electric power of 5.3 μ W across a load resistance of 50 k Ω was measured.…”

Section: Grain Textured and Epitaxial Piezoelectric Fi Lmsmentioning

confidence: 99%

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Piezoelectric MEMS for energy harvesting

2012

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Section: Lead-free Piezoelectric Fi Lmsmentioning

confidence: 96%

Section: Grain Textured and Epitaxial Piezoelectric Fi Lmsmentioning

confidence: 99%

Section: Grain Textured and Epitaxial Piezoelectric Fi Lmsmentioning

confidence: 99%

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Piezoelectric MEMS for energy harvesting

2012

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“…At volumes smaller than 0.5 cm 3 the electromagnetic transformation factor is reduced abruptly [61]. The piezoelectric mechanism has the highest energy conversion efficiency [63,64] and is the most appropriate technology for the scale of MEMS devices [65,66].…”

Section: Mems Devices Based On Piezoelectric Transduction Mechanismmentioning

confidence: 99%

MEMS Technologies for Energy Harvesting

Domínguez-Pumar

Pons-Nin

Chávez-Domínguez

2016

Nonlinearity in Energy Harvesting Systems

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The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and its application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. Next, the chapter follows with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as by placing fixed magnets, buckling of beams, or by using slightly slanted clamped-clamped beams. Other nonlinear mechanisms are studied such as impact energy transfer, or the design of nonlinear springs. Finally, due to their importance in the field of MEMS and their application to energy harvesters, an introduction to the actuation with piezoelectric materials is made. Examples of energy harvesters found in the literature using this actuation principle are also presented.

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“…При этом, самое низкое зна чение норма лизованной удельной мощности (0,055 мкВт/мм 3 /g 2 ) получено в устройстве с при менением AlN на стальной подложке [11], что в основном объясняется неоптимальным соотно шением толщин пленок.…”

Section: нанотехнологии мэмс однорезонансные генераторыunclassified