2014
DOI: 10.1364/oe.22.029978
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High-efficiency Si optical modulator using Cu travelling-wave electrode

Abstract: We demonstrate a high-efficiency and CMOS-compatible silicon Mach-Zehnder Interferometer (MZI) optical modulator with Cu traveling-wave electrode and doping compensation. The measured electro-optic bandwidth at Vbias = -5 V is above 30 GHz when it is operated at 1550 nm. At a data rate of 50 Gbps, the dynamic extinction ratio is more than 7 dB. The phase shifter is composed of a 3 mm-long reverse-biased PN junction with modulation efficiency (Vπ·Lπ) of ~18.5 V·mm. Such a Cu-photonics technology provides an att… Show more

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Cited by 49 publications
(17 citation statements)
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“…3a. We compute the voltage according to equation 2 by using a SiO 2 dielectric layer and compare the result with that of typical Si modulators [93][94][95][96][97][98][99][100][101][102][103] based on p-n junctions or capacitors in the same range of voltages. By biasing SLG to |E F | > E ph /2, where absorption is small, a neff modulation ~2 x 10 −3 can be obtained [79].…”
Section: Graphene-based Modulatorsmentioning
confidence: 99%
See 1 more Smart Citation
“…3a. We compute the voltage according to equation 2 by using a SiO 2 dielectric layer and compare the result with that of typical Si modulators [93][94][95][96][97][98][99][100][101][102][103] based on p-n junctions or capacitors in the same range of voltages. By biasing SLG to |E F | > E ph /2, where absorption is small, a neff modulation ~2 x 10 −3 can be obtained [79].…”
Section: Graphene-based Modulatorsmentioning
confidence: 99%
“…Si photonics transmitters are mainly based on MZI modulators [124]. Depending on the ratio between the bit time, T BIT (the time duration of a single bit), and the transit time of the optical wave through the modulator, T T , modulators can be classified as lumped [70,77,93,94,105] or travelling wave [96][97][98][99]125]. T BIT is the reciprocal of the bit rate, defined as the number of bits per second.…”
Section: Graphene Integration On Sinmentioning
confidence: 99%
“…"Double-drive" push-pull configuration requires two driving signals for the two electrically isolated arms widely used in TWMs with GSGSG electrodes [7][8][9]25]. For double-drive push-pull driving, the RF voltages applied to the two arms have a relative π-phase difference [ Fig.…”
Section: Terminologymentioning
confidence: 99%
“…Balanced interferometers eliminate the need for thermal control, but conventional silicon traveling wave modulators (TWMs) are generally energy-hungry physically because they use driving voltages inefficiently and dissipate all remaining power at termination resistors. Their energy consumption to realize a phase shift of Δφ 0.1π per arm is usually 1-10 pJ∕bit [6][7][8][9][10][11]. This phase shift is the typical demonstration in the literature and is close to the short-reach interconnect requirement of 3.5 dB extinction ratio at quadrature point (Δφ 0.125π).…”
Section: Introductionmentioning
confidence: 99%
“…Heaters are an attractive solution for phase shifting in silicon photonics due their simplicity of implementation and their compactness, compared to alternatives such as free-carrier modulators [1][2][3]. Although compact, heaters require bulky pads to connect them to external driver electronics.…”
Section: Introduction and Conceptmentioning
confidence: 99%