High-end spectroscopic diffraction gratings: design and manufacturing

Glaser, Tilman

doi:10.1515/aot-2014-0063

Cited by 13 publications

(3 citation statements)

References 35 publications

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“…The lithographic fabrication of aberration-corrected gratings, specifically concave aberration-corrected gratings made by interference lithography (IFL), is described very comprehensively by Glaser. 1 The possibilities and limitations of lithographic manufacturing of blaze gratings are also explained, with reference to the alternative of UP machining. The review indicated that there were no known UP technologies that have actually fabricated aberrationcorrected gratings.…”

Section: Up Machining Of Diffraction Gratingsmentioning

confidence: 99%

Ultraprecision machining of aberration-corrected diffractive optics with phase correcting groove trajectories

Jagodzinski,

Kühne,

Oberschmidt

2024

J. Optical Microsystems

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Spectroscopy has emerged as an essential technology, particularly in decentralized utilization within point-of-care devices. These applications demand compact, costeffective designs with reduced complexity compared with traditional laboratory equipment. Achieving compactness often involves minimizing the number of components, necessitating that each remaining component fulfills multiple functions to optimize performance. However, this approach can lead to significant aberrations due to constructive compromises. Nevertheless, the known phase errors enable correction, often achieved directly through diffractive elements. Diffractive compensation of aberrations is commonly conducted through interference lithography, exploiting holographic techniques to produce gratings without explicit knowledge of the interference structure. Alternatively, mechanical manufacturing techniques offer the possibility of producing blazed gratings with greater efficiency. However, diffractive correction using mechanically fabricated gratings requires a precise understanding of individual groove trajectories, presenting an ongoing challenge. We employed ultraprecision (UP) mechanical manufacturing techniques to create aberration-corrected diffraction gratings for spectroscopic applications. To enable the machining of freeform trajectories, facilitating versatile fabrication of both planar and concave imaging blazed gratings, a modified five-axis UP machinery is employed. To correct the known wavefront errors of the exemplary use cases, a nonlinear phase function was applied and a numerical method was developed to derive trajectories from the phase errors and translate them into machine code. The use cases are a blazed imaging planar Littrow grating and concave Rowland gratings, showcasing corrected astigmatic wavefront deviation. The theoretical and experimental results are compared and discussed.

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Section: Up Machining Of Diffraction Gratingsmentioning

confidence: 99%

Ultraprecision machining of aberration-corrected diffractive optics with phase correcting groove trajectories

Jagodzinski,

Kühne,

Oberschmidt

2024

J. Optical Microsystems

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“…However, this approach is generally too complicated and cumbersome for surface shapes and characteristics of diffraction gratings compared with the approach providing the same result for practical purposes, which is presented further. It is more important that there is a difference in the integral diffraction efficiency of curved gratings having the similar groove profile in the middle of the aperture, but produced by different techniques: mechanical burnishing with a ruling engine, or holographic writing (interferometry), or direct laser recording, or various newer writing techniques, such as electron-beam lithography and Si-etching, or their combinations [1][2][3]43]. The reason is that it is a local groove profile, which may or may not vary along the aperture of the concave/ convex grating, and the integral efficiency may thus differ at times for different grating manufacture techniques [25].…”

Section: Partition Of a Curved Grating In Plane Sectionsmentioning

confidence: 99%

“…In recent years, there have been rapid advances in the manufacture of long-, near-and sub-wavelength diffraction optical elements (periodic, quasi-periodic and non-periodic reliefs) owing to their wide application to spectroscopy, waveguides, fibre and integral optics, optronics, photonic crystals, plasmonics, metamaterials, telecommunication systems, superdense data recording, biosensors, etc [1][2][3]. Curved (concave or convex, spherical or aspherical) gratings are usually employed in flatfield, Offner, and Rowland spectrometers.…”

Section: Introductionmentioning

confidence: 99%

Rigorous accounting diffraction on non-plane gratings irradiated by non-planar waves

Goray¹

2022

J. Opt.

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The modified boundary integral equation method (MIM) is considered a rigorous theoretical application for the diffraction of cylindrical waves by arbitrary profiled plane gratings, as well as for the diffraction of plane/non-planar waves by concave/convex gratings. This study investigates two-dimensional (2D) diffraction problems of the filiform source electromagnetic field scattered by a plane lamellar grating and of plane waves scattered by a similar cylindrical-shaped grating. Unlike the problem of plane wave diffraction by a plane grating, the field of a localised source does not satisfy the quasi-periodicity requirement. Fourier transform is used to reduce the solution of the problem of localised source diffraction by the grating in the whole region to the solution of the problem of diffraction inside one Floquet channel. By considering the periodicity of the geometry structure, the problem of Floquet terms for the image can be formulated so that it enables the application of the MIM developed for plane wave diffraction problems. Accounting of the local structure of an incident field enables both the prediction of the corresponding efficiencies and the specification of the bounds within which the approximation of the incident field with plane waves is correct. For 2D diffraction problems of the high-conductive plane grating irradiated by cylindrical waves and the cylindrical high-conductive grating irradiated by plane waves, decompositions in sets of plane waves/sections are investigated. The application of such decomposition, including the dependence on the number of plane waves/sections and radii of the grating and wave front shape, was demonstrated for lamellar, sinusoidal and saw-tooth grating examples in the 0th & –1st orders as well as in the transverse electric and transverse magnetic polarisations. The primary effects of plane wave/section partitions of non-planar wave fronts and curved grating shapes on the exact solutions for 2D and three-dimensional (conical) diffraction problems are discussed.

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Adjustment of Phase Shift of Measurement Signals in an Optical Encoder from the Parameters of an Analyzing Scale

et al. 2019

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High-end spectroscopic diffraction gratings: design and manufacturing

Cited by 13 publications

References 35 publications

Ultraprecision machining of aberration-corrected diffractive optics with phase correcting groove trajectories

Ultraprecision machining of aberration-corrected diffractive optics with phase correcting groove trajectories

Rigorous accounting diffraction on non-plane gratings irradiated by non-planar waves

Adjustment of Phase Shift of Measurement Signals in an Optical Encoder from the Parameters of an Analyzing Scale

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