High frequency Piezoelectric Resonant Nanochannel for bio-sensing applications in liquid environment

Zuniga, C.; Rinaldi, Matteo; Piazza, Gianluca

doi:10.1109/icsens.2010.5690848

Cited by 14 publications

(11 citation statements)

References 10 publications

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“…2c,d). Measurements of fluidic dissipation in SMR devices suggest that some Q degradation may occur for fluid-filled nanochannels 38,39 , but these results are not fully understood theoretically 40,41 . So far, despite the high values of Q attained, the performance of SMR biosensors is modest.…”

Section: Different Types Of Mechanical Biosensormentioning

confidence: 99%

Comparative advantages of mechanical biosensors

2011

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Mechanical interactions are fundamental to biology. Mechanical forces of chemical origin determine motility and adhesion on the cellular scale, and govern transport and affinity on the molecular scale. Biological sensing in the mechanical domain provides unique opportunities to measure forces, displacements and mass changes from cellular and subcellular processes. Nanomechanical systems are particularly well matched in size with molecular interactions, and provide a basis for biological probes with single-molecule sensitivity. Here we review micro- and nanoscale biosensors, with a particular focus on fast mechanical biosensing in fluid by mass- and force-based methods, and the challenges presented by non-specific interactions. We explain the general issues that will be critical to the success of any type of next-generation mechanical biosensor, such as the need to improve intrinsic device performance, fabrication reproducibility and system integration. We also discuss the need for a greater understanding of analyte–sensor interactions on the nanoscale and of stochastic processes in the sensing environment.

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Section: Different Types Of Mechanical Biosensormentioning

confidence: 99%

Comparative advantages of mechanical biosensors

2011

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“…However, as most biological sensing needs to be carried within biofluids, most resonant modes are damped so heavily that they could no longer be used as gravimetric sensors. The resonant modes that can still result in high quality factors often rely on in-plane movements of the resonator relative to the liquid surface [ 148 , 274 , 279 , 300 , 301 , 302 ]. It is also possible to build micro- or nano-channels within the structure of the resonator (see Figure 34 ) [ 45 ].…”

Section: Applicationsmentioning

confidence: 99%

Micromachined Resonators: A Review

et al. 2016

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This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

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“…The new design has demonstrated performance far superior than the first generation of PRNs effectively proving the enhancement in both the design and fabrication process [7,8]. The confinement of the nanochannel over a fraction of the total surface of the device together with a nanochannel thickness comparable to the penetration depth in water (~160 nm at 13 MHz) allowed the PRNs with very narrow channels' widths (3.3% to 10% of the device total width) to attain Qs as high as 1710 at 13 MHz and equal to 1567 at 18.6 MHz when filled with DI-water.…”

Section: Resultsmentioning

confidence: 98%

“…The device that constitutes the basis of this work consists of a laterally vibrating nanochannel [7,8]. As explained elsewhere [8], the Piezoelectric Resonant Nanochannel is composed of two layers of AlN enclosing a nano-scaled airgap in between them.…”

Section: Designmentioning

confidence: 99%

Single Transistor Oscillator Based on Piezoelectric Resonant Nanochannel for Operation in Liquids

Zuniga¹,

Rinaldi²,

Tazzoli³

et al. 2012

2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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A single transistor oscillator based on an 18 MHz piezoelectric resonant nanochannel is presented as the first demonstration of MEMS acoustic resonators with integrated nanochannels connected to a compact and portable oscillator readout enabling the sensor operation in liquids. This result represents a breakthrough for MEMS resonators operated in liquids as these devices are the first of their kind to be directly connected to a compact electronic oscillator.

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High frequency Piezoelectric Resonant Nanochannel for bio-sensing applications in liquid environment

Cited by 14 publications

References 10 publications

Comparative advantages of mechanical biosensors

Comparative advantages of mechanical biosensors

Micromachined Resonators: A Review

Single Transistor Oscillator Based on Piezoelectric Resonant Nanochannel for Operation in Liquids

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