Abstract-A circularly polarized (CP) substrate integrated waveguide (SIW) cavity-backed slot antenna is proposed. A slot split ring (SSR) etched on the top metal surface of an SIW resonator is employed to generate the right-handed circularly polarized (RHCP) wave. The proposed antenna is excited directly by a coaxial probe with a proper distance from the symmetric axis of the SSR resonator. A prototype of the proposed CP antenna at the center frequency of 10 GHz is manufactured. As a result, the proposed antenna exhibits the advantages of both conventional planar antennas and metallic cavity backed antennas, including simple structure, compact size of 15.8×15.8 mm 2 , light weight, easy fabrication, high gain and wide axial ratio bandwidth. It is proved by experiment that an impedance bandwidth of 10.2% for the reflection coefficient less than −10 dB, an axial ratio (AR) bandwidth of 1.72% for AR less than 3 dB, and a RHCP gain 5.5 dBi have been obtained.