High-<i>Q</i> aluminum nitride Lamb wave resonators with biconvex edges

Lin, Chih‐Ming; Lai, Yun; Hsu, Jin‐Chen; Chen, Yung Yu; Senesky, Debbie G.; Pisano, Albert P.

doi:10.1063/1.3643153

Cited by 90 publications

(47 citation statements)

References 13 publications

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“…More specifically, the lowest symmetric (S 0 ) Lamb wave mode in an AlN thin plate is particularly preferred because it exhibits high phase velocity of approximately 10000 m/s, low phase velocity dispersion, and moderate electromechanical coupling coefficient [4][5][6][7][8][9]. The Lamb wave resonator utilizing the S 0 mode show a quality factor (Q) of 3000 at 875 MHz [10], but the Q would be degraded to 500 while the IDT finger width is downscaled to the nanometer scale for a super-high resonance frequency (f s ) up to 3.46 GHz [11].…”

Section: Introductionmentioning

confidence: 99%

Dispersion characteristics of high-order lamb wave modes in an AlN/3C-SiC layered plate

Lin

Chen

Felmetsger³

et al. 2012

2012 IEEE International Ultrasonics Symposium

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A new propagation layered media composed of a piezoelectric thin film and a substrate plate is studied in this work. The displacement profiles, phase velocities, and electromechanical coupling coefficients of Lamb wave modes are theoretically investigated for the c-axis oriented AlN films on cubic silicon carbide (3C-SiC) plates. Due to the different material properties of the AlN and 3C-SiC layers, the displacement profiles of Lamb wave modes are not simply antisymmetric or symmetric with respect to the neutral axis. According to the displacement profiles, the plate acoustic wave modes in the layered plate are classified as quasi-Lamb wave modes. Some high-order quasi-Lamb wave modes in the layered plate have larger electromechanical couplings than the corresponding Lamb wave modes in an AlN thin plate. In addition, the third quasi-symmetric (QS 3 ) Lamb wave mode exhibits a low motional impedance (R m ) of 91 ohm and a high quality factor (Q) up to 5510 at a frequency (f s ) of 2.92 GHz, resulting in the highest f s ·Q product, 1.61×10 13 Hz, among suspended piezoelectric thin film resonators reported to date.Index Terms-Lamb wave resonator, aluminum nitride, cubic silicon carbide, quasi-Lamb wave mode, high quality factor, dispersion, high-order Lamb wave modes, quasi-antisymmetric mode, quasi-symmetric mode, harsh environment.

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Section: Introductionmentioning

confidence: 99%

Dispersion characteristics of high-order lamb wave modes in an AlN/3C-SiC layered plate

Lin

Chen

Felmetsger³

et al. 2012

2012 IEEE International Ultrasonics Symposium

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“…Recently, piezoelectric Lamb wave resonators are of interests due to the high phase velocity, low dispersive phase velocity characteristic, and moderate electromechanical coupling coefficients [15][16][17][18]. Utilization of the acoustic band gap within a two-dimensional (2D) PC as the reflective gratings was investigated experimentally in a two-port SAW resonator [19].…”

Section: Introductionmentioning

confidence: 99%

A ZnO/silicon Lamb wave filter using phononic crystals

Sun

Lan

Kuo

et al. 2012

2012 IEEE International Frequency Control Symposium Proceedings

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This paper presents numerical and experimental studies on a ladder-type Lamb wave filter using phononic crystal gratings. The ladder-type filter was constructed by introducing two line defects as resonant cavities in a siliconbased phononic crystal plate. In this study, the resonant cavities utilizing phononic crystals were analyzed and designed by finite element method. The experimental results demonstrate that a 1-stage ladder-type filter shows the -24 dB insertion loss, 28 dB out-of-band rejection and 0.11 MHz (0.07%) 3dB bandwidth at 159 MHz.

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“…18 Besides using the poly-Si film with high crystallinity, Q factors have been improved by different methods: combining a single crystalline material with polycrystalline material; 19 reducing the anchor loss by specially designing the resonator geometry. 20 Metal-induced lateral crystallization (MILC) has been used previously to increase the grain size in poly-Si films, accomplished by using Ni nanoparticles (NPs) synthesized within apoferritin, a cage-shaped protein supramolecule ( Fig. 1).…”

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confidence: 99%