2023
DOI: 10.1088/1361-6641/acd13d
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High optoelectronic quality of AZO films grown by RF-magnetron sputtering for organic electronics applications

Abstract: Aluminum-doped zinc oxide thin films, known by the acronym AZO, were grown by radio-frequency magnetron sputtering method (rf-magnetron sputtering) onto glass substrate at room temperature and without posterior heat treatment. The impact on the structural, electrical, and optical properties of the AZO films was studied as a function of the following deposition parameters: working pressure, rf-power and thickness. Our films showed low electrical resistivity and high transmittance in the visible region comparabl… Show more

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Cited by 6 publications
(6 citation statements)
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“…To the best of our knowledge, this work is the world’s first on TrOLED, and it is suitable for applications such as AR, smart glasses, and MR, with the AZO/Ag/AZO electrode that is capable of maximizing the transparency and flexibility for the wearable device. Furthermore, compared to other studies where the AZO or AZO/Ag/AZO anode is used for OLED, despite being a TrOLED, the characteristics of our device are impressive [ 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 ].…”
Section: Discussionmentioning
confidence: 73%
“…To the best of our knowledge, this work is the world’s first on TrOLED, and it is suitable for applications such as AR, smart glasses, and MR, with the AZO/Ag/AZO electrode that is capable of maximizing the transparency and flexibility for the wearable device. Furthermore, compared to other studies where the AZO or AZO/Ag/AZO anode is used for OLED, despite being a TrOLED, the characteristics of our device are impressive [ 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 ].…”
Section: Discussionmentioning
confidence: 73%
“…The ITO film deposited on the CMC/HA 5 substrate showed an electrical resistivity of 5.0 × 10 −4 Ω/m (sheet resistance of 35 Ω/□), a value very close to that exhibited by the commercial ITO-coated glass substrate. 50 This granular appearance indicates the crystalline nature of the material. During the sputtering deposition of ITO, the material undergoes rearrangement, resulting in the formation of grains in accordance with the crystallinity standards of ITO.…”
Section: Stress−strain Analysismentioning
confidence: 99%
“…In order to improve the film's conductivity, extrinsic dopants such as Al (AZO-Al-doped ZnO) or Ga (GZO-Ga-doped ZnO) are introduced, giving material properties such as transparency and conductivity that are comparable with those of ITO [133]. Silva et al [134] reported an optimized AZO thin film to be used in organic electronics with electrical resistivity of 4.9 × 10 −4 Ω•cm and average transmittance of 92% in the visible region (400-700 nm). An AZO-based test OLED showed electro-optical performance comparable to the ITO-based reference device in terms of the luminance and turn-on voltages.…”
Section: Transparent Conductive Oxidesmentioning
confidence: 99%