High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector

Hu, Yuxuan; Dong, Bin; Liu, Liang; Wang, Zhizhong; Ruan, Shuangchen

doi:10.3390/s22197439

Cited by 6 publications

(5 citation statements)

References 46 publications

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“…With the popularization of fifth-generation communication equipment and the realization of the interconnection of everything, piezoelectric materials, such as aluminum nitride (AlN), zinc oxide (ZnO), gallium nitride (GaN), and PZT, are being increasingly used in bulk acoustic wave (BAW) or surface acoustic wave (SAW) resonators, including film bulk acoustic resonators [1][2][3][4], solidly mounted resonators [5]. Some of these practical applications are closely related to the propagation characteristics of SAW in piezoelectric materials.…”

Section: Introductionmentioning

confidence: 99%

“…Since the dispersion and attenuation characteristics of cylindrical SAW are independent of the radial coordinate, the mathematical models in this paper provide theoretical guidance for studying the propagation characteristics of other types of SAW in PSC materials, such as the Rayleigh-type SAW. Since the influence of the homo-and hetero-junctions mainly concentrates on the attenuation characteristic of SAW, the discussion in this paper provides theoretical guidance for the design and manufacture of SAW resonators [3,4], energy harvesting [6,7], and acoustic wave amplification [8]. Due to the interface characteristic lengths, the first mathematical model is more complex than the second.…”

mentioning

confidence: 99%

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Influence of Homo- and Hetero-Junctions on the Propagation Characteristics of Radially Propagated Cylindrical Surface Acoustic Waves in a Piezoelectric Semiconductor Semi-Infinite Medium

Guo,

Wang,

et al. 2024

Mathematics

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This paper theoretically investigates the influence of homo- and hetero-junctions on the propagation characteristics of radially propagated cylindrical surface acoustic waves in a piezoelectric semiconductor semi-infinite medium. First, the basic equations of the piezoelectric semiconductor semi-infinite medium are mathematically derived. Then, based on these basic equations and the transfer matrix method, two equivalent mathematical models are established concerning the propagation of radially propagated cylindrical surface acoustic waves in this piezoelectric semiconductor semi-infinite medium. Based on the surface and interface effect theory, the homo- or hetero-junction is theoretically treated as a two-dimensional electrically imperfect interface in the first mathematical model. To legitimately confirm the interface characteristic lengths that appear in the electrically imperfect interface conditions, the homo- or hetero-junction is equivalently treated as a functional gradient thin layer in the second mathematical model. Finally, based on these two mathematical models, the dispersion and attenuation curves of radially propagated cylindrical surface acoustic waves are numerically calculated to discuss the influence of the homo- and hetero-junctions on the dispersion and attenuation characteristics of radially propagated cylindrical surface acoustic waves. The interface characteristic lengths are legitimately confirmed through the comparison of dispersion and attenuation curves calculated using the two equivalent mathematical models. As piezoelectric semiconductor energy harvesters usually work under elastic deformation, the establishment of mathematical models and the revelation of physical mechanisms are both fundamental to the analysis and optimization of micro-scale surface acoustic wave resonators, energy harvesters, and acoustic wave amplification based on the propagation of surface acoustic waves.

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Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

Influence of Homo- and Hetero-Junctions on the Propagation Characteristics of Radially Propagated Cylindrical Surface Acoustic Waves in a Piezoelectric Semiconductor Semi-Infinite Medium

Guo,

Wang,

et al. 2024

Mathematics

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“…Researchers have made significant advancements in the fabrication of Film Bulk Acoustic Resonators (FBARs) using Microelectromechanical Systems (MEMS) technology and compatible Piezoelectric (PZE) materials. Several PZE materials, including Zinc Oxide (ZnO), Aluminium Nitride (AlN), Gallium Nitride (GaN), magnesium-doped zinc oxide (MgxZn1-xO), and PZT, have been successfully employed in the fabrication of FBARs [20][21][22][23][24]. Additionally, researchers have explored the use of ferroelectric materials such as barium strontium titanate (BaxSr1-xTiO 3 , BST), strontium titanate (SrTiO 3 , STO), and barium titanate (BaTiO 3 , BTO) for FBAR fabrication.…”

Section: Introductionmentioning

confidence: 99%

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation

Patel,

Adhikari,

Tripathi

et al. 2023

Sensors

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In this paper, the study is supported by design, FEA simulation, and practical RF measurements on fabricated single-port-cavity-based acoustic resonator for gas sensing applications. In the FEA simulation, frequency domain analysis was performed to enhance the performance of the acoustic resonator. The structural and surface morphologies of the deposited ZnO as a piezoelectric layer have been studied using XRD and AFM. The XRD pattern of deposited bulk ZnO film indicates the perfect single crystalline nature of the film with dominant phase (002) at 2θ = 34.58°. The AFM micrograph indicates that deposited piezoelectric film has a very smooth surface and small grain size. In the fabrication process, use of bulk micro machined oxide (SiO2) for the production of a thin membrane as a support layer is adopted. A vector network analyzer (Model MS2028C, Anritsu) was used to measure the radio frequency response of the resonators from 1 GHz to 2.5 GHz. As a result, we have successfully fabricated an acoustic resonator operating at 1.84 GHz with a quality factor Q of 214 and an effective electromechanical coupling coefficient of 10.57%.

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“…Another advantage of the proposed new SH elastic surface waves is the fact that they have only one component of the mechanical displacement

(along axis

), which is completely uncoupled with the remaining components of mechanical vibrations, such as longitudinal (L, along axis

) and shear vertical (SV, along axis

). Multimodal coupling may be a significant problem in conventional bulk ultrasonic devices [ 16 , 17 ].…”

Section: Introductionmentioning

confidence: 99%

New Shear Horizontal (SH) Surface-Plasmon-Polariton-like Elastic Surface Waves for Sensing Applications

Kiełczyński

2023

Sensors

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The advent of elastic metamaterials at the beginning of the 21st century opened new venues and possibilities for the existence of new types of elastic (ultrasonic) surface waves, which were deemed previously impossible. In fact, it is not difficult to prove that shear horizontal (SH) elastic surface waves cannot exist on the elastic half-space or at the interface between two conventional elastic half-spaces. However, in this paper we will show that SH elastic surface waves can propagate at the interface between two elastic half-spaces, providing that one of them is a metamaterial with a negative elastic compliance s44(ω). If in addition, s44(ω) changes with frequency ω as the dielectric function ε(ω) in Drude’s model of metals, then the proposed SH elastic surface waves can be considered as an elastic analogue of surface plasmon polariton (SPP) electromagnetic waves, propagating at a metal-dielectric interface. Due to inherent similarities between the proposed SH elastic surface waves and SPP electromagnetic waves, the new results developed in this paper can be readily transferred into the SPP domain and vice versa. The proposed new SH elastic surface waves are characterized by a strong subwavelength confinement of energy in the vicinity of the guiding interface; therefore, they can potentially be used in subwavelength ultrasonic imaging, superlensing, and/or acoustic (ultrasonic) sensors with extremely high mass sensitivity.

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High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector

Cited by 6 publications

References 46 publications

Influence of Homo- and Hetero-Junctions on the Propagation Characteristics of Radially Propagated Cylindrical Surface Acoustic Waves in a Piezoelectric Semiconductor Semi-Infinite Medium

Influence of Homo- and Hetero-Junctions on the Propagation Characteristics of Radially Propagated Cylindrical Surface Acoustic Waves in a Piezoelectric Semiconductor Semi-Infinite Medium

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation

New Shear Horizontal (SH) Surface-Plasmon-Polariton-like Elastic Surface Waves for Sensing Applications

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