2011
DOI: 10.1063/1.3592569
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High-performance metamorphic InGaAs resonant cavity enhanced photodetector grown on GaAs substrate

Abstract: In this letter, we demonstrated a top illuminated 1.55 μm metamorphic InGaAs resonant-cavity-enhanced p-i-n photodetector grown on GaAs substrate. The photodetectors were grown by a solid-source molecular beam epitaxy system. The high quality linearly graded InxAl0.4Ga1−x−0.4As metamorphic buffer layer enabled photodiodes to achieve ultralow dark current densities of 2.3×10−6 A/cm2 at 0 V and 4.2×10−5 A/cm2 at a reverse bias of 5 V. A high quantum efficiency of 84.4% at resonant wavelength of 1542 nm, a full w… Show more

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Cited by 7 publications
(3 citation statements)
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“…Linearly graded metamorphic buffers have been the widely used in device applications, including HEMTs [18,21,23,105,106,109,110,118,123,129,131,134,135], metal oxide semiconductor high electron mobility transistors (MOS HEMTs) [136], heterojunction bipolar transistors (HBTs) [113,117,118,137], LEDs [31,123], laser diodes [26,81,103,106,122], photodiodes [18,80,108,138,139], and solar cells [119]. Recent work with metamorphic HEMTs has emphasized In x Ga 1Àx As/In y Al 1Ày As quantum wells grown on GaAs (001) substrates by MBE [18,21,23,35,103,118,123,129,131,135].…”
Section: Device Applications Of Linear Buffersmentioning
confidence: 99%
“…Linearly graded metamorphic buffers have been the widely used in device applications, including HEMTs [18,21,23,105,106,109,110,118,123,129,131,134,135], metal oxide semiconductor high electron mobility transistors (MOS HEMTs) [136], heterojunction bipolar transistors (HBTs) [113,117,118,137], LEDs [31,123], laser diodes [26,81,103,106,122], photodiodes [18,80,108,138,139], and solar cells [119]. Recent work with metamorphic HEMTs has emphasized In x Ga 1Àx As/In y Al 1Ày As quantum wells grown on GaAs (001) substrates by MBE [18,21,23,35,103,118,123,129,131,135].…”
Section: Device Applications Of Linear Buffersmentioning
confidence: 99%
“…The RCPDs can be fabricated by directly employing the VCSEL epitaxial layers . Resonant cavity‐enhanced photodetectors (RCE‐PDs) have been studied for a long time, and still attracted a lot of researcher . The RCPDs have the advantage of higher responsivity over a specific wavelength range (cavity mode) which is naturally close to the emission wavelength of monolithic VCSELs.…”
Section: Introductionmentioning
confidence: 99%
“…Low dimensional III-V semiconductor nanostructures have been widely studied on their electronic and optical properties for device applications. Among the nanostructures, the resonant-cavity-enhanced photodetectors (RCE-PDs) have been extensively studied due to their novel physical mechanism and special device applications over the past two decades [1][2][3][4][5][6][7]. A RCE-PD is usually constructed by placing multiple active layers at the peak positions of a standing wave in a resonant cavity, sandwiched between two distributed Bragg reflectors (DBRs).…”
Section: Introductionmentioning
confidence: 99%