2015
DOI: 10.1109/led.2014.2378791
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High Performance of Self-Aligned Transparent Polysilicon-Gate Thin-Film Transistors by NiSi<sub>2</sub> Seed-Induced Lateral Crystallization

Abstract: A heavily doped p-type polysilicon (poly-Si)-gate thin-film transistors using NiSi 2 seed-induced lateral crystallization (SILC) were successfully developed for the transparent electronic device. The hydrogenated amorphous-silicons of gate and active layer were laterally crystallized and doped with B 2 H 6 in self-aligned structure. The average transmittance of SILC poly-Si film showed 68% in the visible spectrum because of its 98% of crystalline volume fraction (χ c ). Comparing with the metal-induced crystal… Show more

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Cited by 4 publications
(4 citation statements)
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“…Therefore, research focus has gradually shifted to active matrix organic light‐emitting diode (AMOLED), as they offer excellent and bright colors without backlighting, filters, or polarizers. However, commercial transparent AMOLEDs still require a rather complicated layout, comprising of an opaque, polycrystalline silicon‐based transistor backplane to drive the pixel's organic light‐emitting diode (OLED) entity . The best reported semitransparent displays of this kind to date show a transmittance of a mere 20% .…”
Section: Results Summary: Averages Were Taken From At Least Five Devimentioning
confidence: 99%
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“…Therefore, research focus has gradually shifted to active matrix organic light‐emitting diode (AMOLED), as they offer excellent and bright colors without backlighting, filters, or polarizers. However, commercial transparent AMOLEDs still require a rather complicated layout, comprising of an opaque, polycrystalline silicon‐based transistor backplane to drive the pixel's organic light‐emitting diode (OLED) entity . The best reported semitransparent displays of this kind to date show a transmittance of a mere 20% .…”
Section: Results Summary: Averages Were Taken From At Least Five Devimentioning
confidence: 99%
“…In effort to improve transparency in AMOLED device structure, a range of metal oxides‐based thin film transistor (TFT) backplanes have been used. These backplanes offer a higher aperture ratio (defined as the ratio of light emitting area over total pixel area) with two‐side emission capability, which could not be anticipated from conventional opaque polycrystalline silicon backplanes . Backplanes based on metal oxide TFTs provide reasonably high charge carrier mobility and transparency, but their processing temperatures (typically ≈500 °C) are incompatible with processing on plastic substrate materials .…”
Section: Results Summary: Averages Were Taken From At Least Five Devimentioning
confidence: 99%
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