2017
DOI: 10.1063/1.5001979
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High-performance solar-blind Al0.6Ga0.4N/Al0.5Ga0.5N MSM type photodetector

Abstract: An Al0.6Ga0.4N/Al0.5Ga0.5N metal–semiconductor–metal (MSM) deep-ultraviolet (DUV) photodetector was developed. It possesses both high photosensitivity and high rejection ratios in comparison to photomultiplier tubes (PMTs). The photodetector was designed to have a two-dimensional electron gas layer at the Al0.6Ga0.4N/Al0.5Ga0.5N hetero-interface, which plays an important role in increasing the photosensitivity. Additionally, for reducing the dark current, a V/Al/Mo/Au electrode was employed as a Schottky elect… Show more

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Cited by 44 publications
(23 citation statements)
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“…Deep ultraviolet (DUV) detection plays an important role in people’s daily life, such as health monitoring, secure communication, and deep space exploration. To meet this demand, ultrawide band gap semiconductors such as quartz, AlN, GaN, and Ga 2 O 3 and alloy materials (AlGaN and ZnMgO) have been used to fabricate DUV photodetectors. Among those materials, β-Ga 2 O 3 (the band gap is 4.9 eV) is used as a very suitable DUV-sensitive material because of its excellent thermal and chemical stability and high visible light transparency. β-Ga 2 O 3 films have been used in extensively developed high-performance DUV photodetectors in the past few years. However, the difference in the thermal expansion coefficient and the lattice mismatch between the β-Ga 2 O 3 film and the substrates make great impact on its crystal quality and device performance.…”
Section: Introductionmentioning
confidence: 99%
“…Deep ultraviolet (DUV) detection plays an important role in people’s daily life, such as health monitoring, secure communication, and deep space exploration. To meet this demand, ultrawide band gap semiconductors such as quartz, AlN, GaN, and Ga 2 O 3 and alloy materials (AlGaN and ZnMgO) have been used to fabricate DUV photodetectors. Among those materials, β-Ga 2 O 3 (the band gap is 4.9 eV) is used as a very suitable DUV-sensitive material because of its excellent thermal and chemical stability and high visible light transparency. β-Ga 2 O 3 films have been used in extensively developed high-performance DUV photodetectors in the past few years. However, the difference in the thermal expansion coefficient and the lattice mismatch between the β-Ga 2 O 3 film and the substrates make great impact on its crystal quality and device performance.…”
Section: Introductionmentioning
confidence: 99%
“…Edge TDs and suppression of leakage current using a surface passivation layer in MSM-based PDs have also been widely discussed [504,505] . Other than that, carrier collection mechanisms and influence of core threading dislocation in MSM-based PDs have recently been reported by Walde et al [506] . This work [507] .…”
Section: Photodetectorsmentioning
confidence: 90%
“…Ultraviolet PDUs is a device for converting UV light signals into electrical signals, which is widely used in military, weather, medicine and other fields. [97][98][99] All-inorganic non-lead perovskite materials generally have a large optical bandgap and excellent response to UV light. At the same time, excellent stability in all aspects endows them a great value for research in imaging PDUs.…”
Section: All-inorganic Perovskite Pdus For Uv Imagingmentioning
confidence: 99%