2015
DOI: 10.1063/1.4929151
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High-performance terahertz wave absorbers made of silicon-based metamaterials

Abstract: Electromagnetic (EM) wave absorbers with high efficiency in different frequency bands have been extensively investigated for various applications. In this paper, we propose an ultra-broadband and polarization-insensitive terahertz metamaterial absorber based on a patterned lossy silicon substrate. Experimentally, a large absorption efficiency more than 95% in a frequency range of 0.9–2.5 THz was obtained up to a wave incident angle as large as 70°. Much broader absorption bandwidth and excellent oblique incide… Show more

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Cited by 115 publications
(49 citation statements)
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“…4(b), which is qualitatively consistent with the waveguide cavity explanation. 25 For h = 140µm, the absorbance is larger than 90% in our interested frequency range of 0.51 to 3 THz and larger than 99% from 1.2 to 3 THz, better than existing silicon-based absorbers to our best knowledge. Although the efficiency of our sawtooth absorber can be further improved a little bit, we stop the height optimization process at h = 140µm, considering the fabrication difficulties for higher silicon sawtooth structure.…”
Section: -mentioning
confidence: 99%
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“…4(b), which is qualitatively consistent with the waveguide cavity explanation. 25 For h = 140µm, the absorbance is larger than 90% in our interested frequency range of 0.51 to 3 THz and larger than 99% from 1.2 to 3 THz, better than existing silicon-based absorbers to our best knowledge. Although the efficiency of our sawtooth absorber can be further improved a little bit, we stop the height optimization process at h = 140µm, considering the fabrication difficulties for higher silicon sawtooth structure.…”
Section: -mentioning
confidence: 99%
“…30 Here we choose ω p = 2π × 5.22 THz and γ = 2π × 1.32 THz in our following structure design since doped silicon with these parameters had already been realized in reference. 25 The structure of our absorber are schematically shown in Fig. 1(a).…”
Section: The Performance Of Sawtooth-shaped Absorbermentioning
confidence: 99%
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