High-performance ultrasonic transducers based on PMN-PT single crystals fabricated in 1-3 Piezo-Composite Technology

Herzog, Thomas; Walter, Susan; Lee, Sang-goo; Lee, Jehee; Schubert, Frank; Heuer, Henning

doi:10.1121/2.0001159

Cited by 3 publications

(2 citation statements)

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“…To further improve the performance of the devices, the substrate material can be changed to a piezoelectric composite, such as a 1–3 composite consisting of a lead magnesium niobate-lead titanate (PMN-PT) single crystal and epoxy, which has a lower loss, lower acoustic impedance, and higher electromechanical coupling coefficient 39 , 40 . Additionally, the acoustic impedance of the lens materials could be increased by adding titanium oxide (TiO 2 ) nanoparticles 38 , 41 , which will bring the acoustic impedance of the lens material closer to the square root of the product of the acoustic impedances of PZT and water (7.32 MRayl) for better acoustic matching 31 .…”

Section: Discussionmentioning

confidence: 99%

Simple sacrificial-layer-free microfabrication processes for air-cavity Fresnel acoustic lenses (ACFALs) with improved focusing performance

Tang

Kim

2022

Microsyst Nanoeng

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Focused ultrasound (FUS) is a powerful tool widely used in biomedical therapy and imaging as well as in sensors and actuators. Conventional focusing techniques based on curved surfaces, metamaterial structures, and multielement phased arrays either present difficulties in massively parallel manufacturing with high precision or require complex drive electronics to operate. These difficulties have been addressed by microfabricated self-focusing acoustic transducers (SFATs) with Parylene air-cavity Fresnel acoustic lenses (ACFALs), which require a time-demanding step in removing the sacrificial layer. This paper presents three new and improved types of ACFALs based on polydimethylsiloxane (PDMS), an SU-8/PDMS bilayer, and SU-8, which are manufactured through simple sacrificial-layer-free microfabrication processes that are two to four times faster than that for the Parylene ACFALs. Moreover, by studying the effect of the lens thickness on the acoustic transmittance through the lens, the performance of the transducers has been optimized with improved thickness control techniques developed for PDMS and SU-8. As a result, the measured power transfer efficiency (PTE) and peak output acoustic pressure are up to 2.0 and 1.8 times higher than those of the Parylene ACFALs, respectively. The simple microfabrication techniques described in this paper are useful for manufacturing not only high-performance ACFALs but also other miniaturized devices with hollow or suspended structures for microfluidic and optical applications.

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Section: Discussionmentioning

confidence: 99%

Simple sacrificial-layer-free microfabrication processes for air-cavity Fresnel acoustic lenses (ACFALs) with improved focusing performance

Tang

Kim

2022

Microsyst Nanoeng

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“…Finally, an SnBi solder with a low melting temperature of 138 • C was used for hot rod welding of materials and circuit boards. Herzog et al [17] prepared 1-3 piezoelectric composites using PMN-PT and epoxy by the "dice-and-fill" method. The electromechanical coupling coefficient is up to 0.61, which is 27.9% higher than that of PZT.…”

Section: Introductionmentioning

confidence: 99%

Design of Planar Array Transducers Based on Connected 1–3 Piezoelectric Composites

et al. 2021

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To improve the transmission performance and preparation of a transducer array, two planar array transducers based on connected 1–3 piezoelectric composites as a matrix were designed. Each transducer contained 25 array elements with a gap of 1 mm between them. The length, width and height of each array element were 1 mm, 26 mm and 5 mm, respectively. Two kinds of array transducers were tested through finite element simulation and experiments. The array transducer prototype was fabricated based on two kinds of composite materials, and the fabrication cycle was short. Our results show that the maximum transmission voltage response of the two-phase 1–3 full array driver is up to 179 dB at 200–400 kHz and the acoustic radiation intensity can be increased by up to 22% compared with the traditional splicing transducer array. It is suitable for short-range target positioning and measurement. Moreover, in the single element mode, the beam of the three-phase 1–3 transducer has no sidelobe and a single element −3 dB beam width of up to 91°. Furthermore, the beam width of the two-phase 1–3 type is 54°, and the acoustic radiation breadth is improved by 40.6%. The three-phase 1–3 type array transducer has the characteristics of concentrated acoustic transmission energy of the whole array, and its −3 dB beam width is 3.5°. The beam width decreased by 12.5%, indicating that the three-phase 1–3 type transducer is suitable for short-range target detection and perception. The two array transducers have their own advantages in transmitting the voltage response and beam width, which must be selected on the basis of the requirements of practical applications.

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Short-fiber piezocomposite and its bandwidth enhancement for high-frequency medical ultrasound transducer

Yang,

Li,

Sun

et al. 2024

J Mater Sci: Mater Electron

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High-performance ultrasonic transducers based on PMN-PT single crystals fabricated in 1-3 Piezo-Composite Technology

Cited by 3 publications

References 0 publications

Simple sacrificial-layer-free microfabrication processes for air-cavity Fresnel acoustic lenses (ACFALs) with improved focusing performance

Simple sacrificial-layer-free microfabrication processes for air-cavity Fresnel acoustic lenses (ACFALs) with improved focusing performance

Design of Planar Array Transducers Based on Connected 1–3 Piezoelectric Composites

Short-fiber piezocomposite and its bandwidth enhancement for high-frequency medical ultrasound transducer

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