“…With the aim of increasing the characteristic temperature and modulation speed of InPbased semiconductor lasers, several studies have been done on InGaAlAs multiple-quantum-well (MQW) structures as an alternative to InGaAsP MQW structures [1,2]. However, in the case of using aluminum-containing materials for buriedheterostructure (BH) lasers and integrated optical devices, the crystalline quality of the regrowth interface is poor because of strong oxidization of the aluminum-containing surface.…”