High Power Density CMOS Compatible Micro-Machined MEMs Energy Harvester

Chauhan, Sandeep Singh; Joglekar, M. M.; Manhas, S. K.

doi:10.1109/jsen.2019.2923972

Cited by 21 publications

(4 citation statements)

References 47 publications

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“…In table 1, first column shows the different methodologies, second column presents the power; third column represents the power density, fourth normalised Power Density and Volume. Here in terms of power paper [18] observes the 0.68 , [19] observes 0.63 , [20] observes 1.46, [21] observes 0.80 and existing mechanism [22] observes 1.03 whereas proposed protocol observes the 1.4. Similarly, in terms of power density the value observed by these methods as [18], [19], [20], [21] and existing [22]are 5.66, 0.46, 1.14, 2.35, 9.36 whereas our methodology observes the 9.61.…”

Section: Iv3 Comparative Evaluationmentioning

confidence: 81%

Acoustic Energy Harvesting Through Multilayer Piezoelectric Harvester Model

Sreenivasulu*,

Shree,

Reddy

2020

IJITEE

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Low-power requirements of contemporary sensing technology attract research on alternate power sources that can replace batteries. Energy harvesters’ function as power sources for sensors and other low-power devices by transducing the ambient energy into usable electrical form. Energy harvesters absorbing the ambient vibrations that have potential to deliver uninterrupted power to sensing nodes installed in remote and vibration rich environments motivate the research in vibrational energy harvesting. Piezoelectric bimorphs have been demonstrating a pre-eminence in converting the mechanical energy in ambient vibrations into electrical energy. Improving the performance of these harvesters is pivotal, as the energy in ambient vibrations is innately low. In this paper, we propose a mechanism namely MultilayerPEHM (Piezoelectric Energy Harvester Model) which helps in converting the waste or unused energy into the useful energy. Multilayer-PEHM contains the various layer, which is placed one over the other, each layer is placed with specific element according to their properties and size, the size of the layer plays an important part for achieving efficiency. Furthermore, this paper presents an audit of the energy available in a vibrating source and design for effective transfer of the energy to harvesters, secondly, design of vibration energy harvesters with a focus to enhance their performance, and lastly, identification of key performance metrics influencing conversion efficiencies and scaling analysis for these acoustic harvesters. Typical vibration levels in stationary installations such as surfaces of blowers and ducts, and in mobile platforms such as light and heavy transport vehicles, are determined by measuring the acceleration signal. The frequency content in the signal is determined from the Fast Fourier Transform.

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Section: Iv3 Comparative Evaluationmentioning

confidence: 81%

Acoustic Energy Harvesting Through Multilayer Piezoelectric Harvester Model

Sreenivasulu*,

Shree,

Reddy

2020

IJITEE

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“…A current option to replace them maintaining an acceptable performance, is to use tunable piezoelectric devices. This kind of resonators inherently have a set of characteristics which allows for its use in a wide range of applications as was suggested by [11], and have energy harvesting compatibility as is shown in [12]. In each of these applications the piezoelectric films are a fundamental component of micro-fabricated system.…”

Section: Introductionmentioning

confidence: 99%

State equations and tensors symmetry of non-linear piezoelectric materials

Jaramillo-Alvarado¹,

Torres‐Jácome²,

Wade³

et al. 2022

Eng. Res. Express

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The linear behavior of piezoelectric materials is well known from a century ago, but also, the non-linear behavior for these material have found a novel way of applications. Currently, the new technologies as the fifth generation of telecommunications (5G) and Internet of Things (IoT) are demanding high requirements for the performance of the devices operating under these technologies e.g. high quality factor, high thermal efficiency and device fabrication compatibility with the standard fabrication processes for integrated circuits as CMOS, FD-SOI and FinFET. In this work, the non-linear state equations for piezoelectric effect in stress- charge formulation, the transformations laws and the high order tensors structures are presented, in order to allow an easy way to implement it on FEM simulation software. The non-linear behavior of piezoelectric materials is discussed, and taking into account the analysis done in this work, three ways to implement nonlinear effects to design tunable piezoelectric devices for 5G and IoT applications are presented.

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“…In the energy harvesters field, the nonlinear effects can be used to enhance the value of V oc by having a better performance. This effect can be obtained through two different ways, modifying the effective electrical permittivity or coupling piezoelectric tensor d iλ (strain-charge formulation) [17].…”

Section: Introductionmentioning

confidence: 99%

Nonlinear effects and applications of AlN: A comprehensive physical formulation approach

Jaramillo Alvarado,

Torres Jacome,

Rosales

et al. 2024

Rev. Mex. Fís.

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Piezoelectric materials have nonlinear effects that can be used in 5G and IoT technologies. However, since most nonlinear problems in this area do not have analytic solutions, FEM simulations are an essential design tool. In this study, we have developed a stress-charge formulation for non-linear piezoelectric materials compatible with commonly used simulation tools in industry and research. FEM simulation results for AlN with three nonlinear phenomena are presented: variation of effective electrical permittivity, shift of the effective elasticity constants, and enhancement of electromechanical coupling factor. These simulations were conducted with the same material parameters, having great agreement with recent and important experimental results. The simulations allow us to deduce the values of the components of the high-order tensors for the first time as qr_331 = qr_333 = −1600 and g_333 = −80N/V m. The maximum percent errors obtained for the simulations of theeffective electrical permittivity and effective elasticity constants were 0.1% and 1.77%, respectively.

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High Power Density CMOS Compatible Micro-Machined MEMs Energy Harvester

Cited by 21 publications

References 47 publications

Acoustic Energy Harvesting Through Multilayer Piezoelectric Harvester Model

Acoustic Energy Harvesting Through Multilayer Piezoelectric Harvester Model

State equations and tensors symmetry of non-linear piezoelectric materials

Nonlinear effects and applications of AlN: A comprehensive physical formulation approach

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