High-power, quasi-single-mode vertical-cavity surface-emitting laser with near-diffraction-limited and low-divergence beam

Abstract

We report on a new type of high-power, single-mode vertical-cavity surface-emitting laser (VCSEL) based on the lasing of a slow-light mode laterally propagating in a long-apertured VCSEL structure. A VCSEL length of 500 μm produces high single-mode power with narrow beam divergence for sensing and 3D imaging applications. Slow-light modes show a lower threshold current and better beam quality. We found the optical resonance in the oxidized region at the end of a mesa helps when selecting a transverse mode. We obtained a quasi-single-mode power of 22 mW under continuous-wave operation. This result shows the possibility to achieve high single-mode power and high beam quality by introducing a mode selection mechanism.

High power surface grating slow-light VCSEL

“…27,28) Alternatively, we proposed and demonstrated a single-mode "slow light laser," combining a slow-light VCSEL waveguide with a coupled-cavity resonator. 29) A quasi single mode with power of 22 mW was obtained, however, highorder modes appeared at higher current injections. 29) We also very recently proposed and reported a surface grating slow light VCSEL, exhibiting a high-power and single mode operation.…”

Surface grating loaded VCSEL with single mode power of over 80 mW

“…In this case, the amplified output is proportional to the amplifier length and the beam divergence is getting smaller and smaller with increasing the length. Very recently we came to the idea to utilize either the surface grating structure or coupled cavity to select a single slow light mode of the long cavity VCSEL itself, which we call a "slow-light laser" [23,24]. However, since high order grating is applied in the first demonstration, there still remains issues in achieving good mode stability in the entire current range.…”

High-resolution two-dimensional solid-state beam scanner module based on vertical-cavity-surface-emitting laser array

“…14,15) We demonstrated the record FoV of >100°and high resolution of >4000 by using the scanner equipped with a diffractive optical element (DOE). 16) Recently a slow-light surfacegrating VCSEL 17,18) was successfully integrated with the solitary scanner to avoid an external light source. 19) It realized a 1D continuous scan range of >100°2 0) and the output peak power reached >3 W.…”