High-precision contactless optical 3D-metrology of silicon sensors

Lavrik, E.; Frankenfeld, U.; Mehta, Shaifali; Panasenko, I.; Schmidt, H. R.

doi:10.1016/j.nima.2019.04.039

“…The conversion ratio motor steps to micrometer for the focus motor stage was used to convert the values of height profile Warp height ( m) Sensor size (cm 2 ) Amount of sensors P-side obtained in motor steps to real-world measurement. Further details about the method for contactless metrology measurement has been presented in [10,11]. The precise knowledge on the sensors warp is an important information during the module assembly procedure, where we aim for an alignment precision of the sensors within ± 100 µm.…”

Section: Warp Measurementmentioning

confidence: 99%

Optical inspection of the silicon micro-strip sensors for the CBM experiment employing artificial intelligence

Lavrik

¹

,

Shiroya

²

,

Schmidt

³

et al. 2022

Nuclear Instruments and Methods in Physics Research Section A:

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Optical inspection of 1191 silicon micro-strip sensors was performed using a custom made optical inspection setup, employing a machine-learning based approach for the defect analysis and subsequent quality assurance. Furthermore, metrological control of the sensor's surface was performed. In this manuscript, we present the analysis of various sensor surface defects. Among these are implant breaks, p-stop breaks, aluminium strip opens, aluminium strip shorts, surface scratches, double metallization layer defects, passivation layer defects, bias resistor defects as well as dust particle identification. The defect detection was done using the application of Convolutional Deep Neural Networks (CDNNs). From this, defective strips and defect clusters were identified, as well as a 2D map of the defects using their geometrical positions on the sensor was performed. Based on the total number of defects found on the sensor's surface, a method for the estimation of sensor's overall quality grade and quality score was proposed.

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“…In this section, we present the warp results obtained for different sensor variants using the same custom made optical inspection setup as shown in Figure 1. The method for contactless metrology measurements has been presented in [11]. The precise knowledge on the sensors warp is an important information during the module assembly procedure, where we aim for an alignment precision of the sensors within ± 100 µm.…”

Section: Warp Measurementmentioning

confidence: 99%

Optical Inspection of the Silicon Micro-strip Sensors for the CBM Experiment employing Artificial Intelligence

Lavrik,

Shiroya,

Schmidt

et al. 2021

Preprint

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0

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Optical inspection of 1191 silicon micro-strip sensors was performed using a custom made optical inspection setup, employing a machine-learning based approach for the defect analysis and subsequent quality assurance. Furthermore, metrological control of the sensor's surface was performed. In this manuscript, we present the analysis of various sensor surface defects. Among these are implant breaks, p-stop breaks, aluminium strip opens, aluminium strip shorts, surface scratches, double metallization layer defects, passivation layer defects, bias resistor defects as well as dust particle identification. The defect detection was done using the application of Convolutional Deep Neural Networks (CDNNs). From this, defective strips and defect clusters were identified, as well as a 2D map of the defects using their geometrical positions on the sensor was performed. Based on the total number of defects found on the sensor's surface, a method for the estimation of sensor's overall quality grade and quality score was proposed.

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“…A wide variety of control and measuring instruments, devices and measuring equipment's used in sphere of construction and housing -communal services [1][2][3][4][5], in mechanical engineering, fuel and energy complex [6], in the field of defense, security and emergency response [7][8][9][10][11][12] as well as the continuous increase in requirements for accuracy, reliability, speed and level of automation leads to the need to develop new and improve existing methods and models [13][14][15][16][17][18][19][20] of operation modern measuring systems. Currently, a new direction in metrology and control and measuring technology has been formed.…”

Section: Introductionmentioning

confidence: 99%

Model of operation of computer measuring system

Ershov

¹

,

Malahov

²

,

Levina

³

et al. 2022

J. Phys.: Conf. Ser.

2

0

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The implementation of the concepts of a smart home - smart city implies a high level of automation using control and measuring devices and equipment, as well as computer and informational technologies. One of the effective trends of automation is the widespread use of computer measuring systems Article presents the model of operation of a computer measuring system with digital data processing is proposed. The presented model is based on the semi-Markov model of operation of an analog-to-digital converter, on the semi-Markov model of an embedded personal computer, on the analytical formula for calculating the availability factor of computer measuring system. The analytical expression for the availability factor of a computer measuring system includes both the technical and operational characteristics of the computer, as well as the metrological and technical characteristics of the analog-to-digital converter. The specified expression allows to find the optimal value of calibration and verification interval. Determination of the optimal calibration interval required to control the metrological characteristics during long-term operation of the computer measuring system. The developed model can be used to set requirements for the metrological support of instruments and de-vices used in the framework of the automation trend in the sphere of housing and communal services.

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High-precision contactless optical 3D-metrology of silicon sensors

Cited by 13 publications

References 8 publications

Optical inspection of the silicon micro-strip sensors for the CBM experiment employing artificial intelligence

Optical inspection of the silicon micro-strip sensors for the CBM experiment employing artificial intelligence

Optical Inspection of the Silicon Micro-strip Sensors for the CBM Experiment employing Artificial Intelligence

Model of operation of computer measuring system

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