Fourth International Symposium on Laser Precision Microfabrication 2003
DOI: 10.1117/12.540506
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High precision deep drilling with ultrashort pulses

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Cited by 30 publications
(4 citation statements)
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“…It was observed that ns laser pulses could also produce similar results for certain materials. Fohl and Dausinger [95] investigated the influence of high repetition rate on drilling efficiency and hole quality. It was found that ripple formation is more dominant in perpendicular polarization and circularly polarized laser beam reduce the effect of laser on the hole exit.…”
Section: Metalsmentioning
confidence: 99%
“…It was observed that ns laser pulses could also produce similar results for certain materials. Fohl and Dausinger [95] investigated the influence of high repetition rate on drilling efficiency and hole quality. It was found that ripple formation is more dominant in perpendicular polarization and circularly polarized laser beam reduce the effect of laser on the hole exit.…”
Section: Metalsmentioning
confidence: 99%
“…Laser-material interactions are known to be strongly influenced by the fluence, pulse duration, wavelength and polarization of the incident laser beam [7][8][9]. In particular, polarization affects both the efficiency and the quality of ultrashort-pulse microprocesses, including helical drilling and cutting [9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…Laser-material interactions are known to be strongly influenced by the fluence, pulse duration, wavelength and polarization of the incident laser beam [7][8][9]. In particular, polarization affects both the efficiency and the quality of ultrashort-pulse microprocesses, including helical drilling and cutting [9][10][11][12]. For example, drilling high-aspectratio (depth/diameter) microscopic holes in metal with linearly polarized ultrashort-pulse lasers produces anisotropic profiles [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…This simplified characterization of the beam propagation is sufficient for the intended feasibility analysis. A more detailed discussion of the working principle of the helical drilling optics 44 , 45 , 50 and the resulting 3D movements of the beam is not necessary and is beyond the scope of this paper.…”
Section: Measurement Methodology and Definitionsmentioning
confidence: 99%