High precision fabrication of antennas and sensors

Balčytis, Armandas; Seniutinas, Gediminas; Urbonas, Darius; Gabalis, Martynas; Vaškevičius, Konstantinas; Petruškevičius, Raimondas; Molis, G.; Valušis, Gintaras; Juodkazis, Saulius

doi:10.1117/12.2180814

Cited by 3 publications

(3 citation statements)

References 31 publications

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“…S5 E-H). With current EBL, features of hundreds of nanometers can be achieved, with potential for scaling down to tens of nanometers using extreme ultraviolet, helium-beam, or AFM-based lithography (28). The interface revealed by ADF-STEM (Fig.…”

Section: Resultsmentioning

confidence: 99%

“…Note that this dipole can be selectively patterned to be zero (MoS 2 , MoSe 2 ), positive (MoSSe), and negative (MoSeS) on such a 2D material "canvas," which would enable many nanostructures and devices with intriguing electrical and optoelectronic properties. For example, with proper choice of physical masks, such as e-beam resist, or carbon nanotubes (28,29) with atomically sharp edges, it is possible to make in-plane quantum wells, superlattices, or photonic devices by generating periodic arrays of such dipole/nondipole lateral heterostructures with 1-to 100-nm periodicity. Not only can the transport and optical properties of these MoXY multiheterostrutures be altered, any materials in close vicinity would also be modulated by such an electrostatic "canvas."…”

Section: Resultsmentioning

confidence: 99%

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Designing artificial two-dimensional landscapes via atomic-layer substitution

Guo

Lin

Xie

et al. 2021

Proc. Natl. Acad. Sci. U.S.A.

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Technology advancements in history have often been propelled by material innovations. In recent years, two-dimensional (2D) materials have attracted substantial interest as an ideal platform to construct atomic-level material architectures. In this work, we design a reaction pathway steered in a very different energy landscape, in contrast to typical thermal chemical vapor deposition method in high temperature, to enable room-temperature atomic-layer substitution (RT-ALS). First-principle calculations elucidate how the RT-ALS process is overall exothermic in energy and only has a small reaction barrier, facilitating the reaction to occur at room temperature. As a result, a variety of Janus monolayer transition metal dichalcogenides with vertical dipole could be universally realized. In particular, the RT-ALS strategy can be combined with lithography and flip-transfer to enable programmable in-plane multiheterostructures with different out-of-plane crystal symmetry and electric polarization. Various characterizations have confirmed the fidelity of the precise single atomic layer conversion. Our approach for designing an artificial 2D landscape at selective locations of a single layer of atoms can lead to unique electronic, photonic, and mechanical properties previously not found in nature. This opens a new paradigm for future material design, enabling structures and properties for unexplored territories.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Designing artificial two-dimensional landscapes via atomic-layer substitution

Guo

Lin

Xie

et al. 2021

Proc. Natl. Acad. Sci. U.S.A.

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“…23,24) The perforated microring resonators were fabricated on SOI platform at ePIXfab (imec, Leuven) using a standard CMOS process by deep ultraviolet (DUV) lithography and by electron beam lithography (EBL) at Melbourne Center for Nanofabrication as well as at the Nanofabrication Facility at Swinburne University of Technology in Australia. 25) The experimental characterization of microrings was performed in the wavelength window 1520-1630 nm using a measurement setup (depicted in Fig. 1) equipped with a TE polarized tunable telecom continuous wave laser coupled into the integrated SOI waveguide devices through vertical grating couplers via a lensed fiber.…”

Section: Methodsmentioning

confidence: 99%

Microring resonators with circular element inner-wall gratings for enhanced sensing

Petruškevičius

Balčytis

Urbonas

et al. 2020

Jpn. J. Appl. Phys.

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We suggest that implementation of a circular element second order Bragg grating 1D photonic crystals into the inner-wall of silicon-on-insulator microring resonators increases the light-matter interaction strength and device free spectral range. Introduction of a specifically tailored grating changes the quality factor of a selected resonance and modulates the losses of the system, leading to the presence of longitudinal resonant air and dielectric Bloch modes. This phenomenon can be harnessed for the development of a self-referenced sensor that is immune to changes in ambient temperature and is well suited for both biomolecule and hydrogen gas exposure sensing. The recent results on numerical modeling, lithographic fabrication, and characterization of microring resonators with circular elements on inner-wall are presented.

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