In this paper, we introduce a cryogen-adaptive sensor based on a
micro-electromechanical system (MEMS) for level measurement of
cryogenic fluids. The sensor is fabricated by an optical fiber
inserted in a glass ferrule and an integrated Fabry–Perot (FP) chip
using the MEMS technique. We carried a liquid nitrogen level
measurement experiment to verify the performance of the sensor and a
low coherent interference system is used to transform the liquid level
to absolute phase. The measuring range is 24 cm and can be expanded
more widely. The experimental results show that the sensor has a good
monotonic linear response (coefficient determination
R
2
>
0.998
), and the measurement error is less
than
±
5
m
m
in liquid nitrogen. The excellent
cryogenic temperature performance from
−
260
∘
C
to
−
100
∘
C
also is demonstrated, which shows
the potential application in level measurement of various cryogenic
liquids.